Novel folding 8x8 silicon-based optical matrix switch with tapered waveguides and self-aligned corner mirrors
文献类型：期刊论文
| 作者 | Li, Zhiyong; Yu, Jinzhong; Chen, Shaowu; Liu, Jingwei |
| 刊名 | Journal of lightwave technology
 |
| 出版日期 | 2006-12-01 |
| 卷号 | 24期号:12页码:5008-5012 |
| 关键词 | Corner reflection mirror Optical switch matrix Silicon on insulator (soi) Wet chemical etching |
| ISSN号 | 0733-8724 |
| DOI | 10.1109/jlt.2006.885241 |
| 通讯作者 | Li, zhiyong(lizhy@red.semi.ac.cn) |
| 英文摘要 | Novel folding 8 x 8 matrix switches based on silicon on insulator were demonstrated. in the design, single-mode rib waveguides and multimode interferences are connected by optimized tapered waveguides to reduce the mode coupling loss between the two types of waveguides. the self-aligned method was applied to the key integrated turning mirrors for perfect positions and low loss of them. a mixed etching process including inductively coupled plasma and chemical etching was employed to etch waveguides and mirrors, respectively. the compact size of the device is only 20 x 3.2 mm(2). the switch element with high switching speed and low power consumption is presented in the matrix. the average insertion loss of the matrix is about -21 db, and the excess loss of one mirror is measured of -1.4 db. the worst crosstalk is larger than 21 db. experimental results illuminate that some of the main characteristics of optical matrix switches are. developed in the modified design, which is in accord with theoretic analyses. |
| WOS关键词 | ON-INSULATOR ; COUPLERS ; COMPACT |
| WOS研究方向 | Engineering ; Optics ; Telecommunications |
| WOS类目 | Engineering, Electrical & Electronic ; Optics ; Telecommunications |
| 语种 | 英语 |
| WOS记录号 | WOS:000243888600048 |
| 出版者 | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426834 |
| 专题 | 半导体研究所 |
| 通讯作者 | Li, Zhiyong |
| 作者单位 | Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li, Zhiyong,Yu, Jinzhong,Chen, Shaowu,et al. Novel folding 8x8 silicon-based optical matrix switch with tapered waveguides and self-aligned corner mirrors[J]. Journal of lightwave technology,2006,24(12):5008-5012. |
| APA | Li, Zhiyong,Yu, Jinzhong,Chen, Shaowu,&Liu, Jingwei.(2006).Novel folding 8x8 silicon-based optical matrix switch with tapered waveguides and self-aligned corner mirrors.Journal of lightwave technology,24(12),5008-5012. |
| MLA | Li, Zhiyong,et al."Novel folding 8x8 silicon-based optical matrix switch with tapered waveguides and self-aligned corner mirrors".Journal of lightwave technology 24.12(2006):5008-5012. |
入库方式： iSwitch采集
来源：半导体研究所
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