Effect of substrate temperature on microstructural and optical properties of zno films grown by pulsed laser deposition
文献类型：期刊论文
| 作者 | He, JT; Zhuang, HZ; Xue, CS; Wang, SY; Hu, LJ; Xue, SB |
| 刊名 | Rare metals
 |
| 出版日期 | 2006-04-01 |
| 卷号 | 25期号:2页码:161-165 |
| 关键词 | Semiconductor materials Zno thin film Pld Hexagonal wurtzite structure |
| ISSN号 | 1001-0521 |
| 通讯作者 | Zhuang, hz() |
| 英文摘要 | Zno thin films were deposited on n-si (111) at various substrate temperatures by pulsed laser deposition (pld). x-ray diffraction (xrd), photoluminescence (pl), fourier transform infrared spectrophotometer (ftir), and scanning electron microscopy (sem) were used to analyze the structure, morphology, and optical property of the zno thin films. an optimal crystallized zno thin film was obtained at the substrate temperature of 600 degrees c. a blue shift was found in pl spectra due to size confinement effect as the grain sizes decreased. the surfaces of the zno thin films were more planar and compact as the substrate temperature increased. |
| WOS关键词 | CHEMICAL-VAPOR-DEPOSITION ; THIN-FILMS ; OPTIMIZATION ; SAPPHIRE ; VIOLET |
| WOS研究方向 | Materials Science ; Metallurgy & Metallurgical Engineering |
| WOS类目 | Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering |
| 语种 | 英语 |
| WOS记录号 | WOS:000237267100011 |
| 出版者 | NONFERROUS METALS SOCIETY CHINA |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426852 |
| 专题 | 半导体研究所 |
| 通讯作者 | Zhuang, HZ |
| 作者单位 | Shandong Normal Univ, Inst Semicond, Jinan 250014, Peoples R China |
| 推荐引用方式 GB/T 7714 | He, JT,Zhuang, HZ,Xue, CS,et al. Effect of substrate temperature on microstructural and optical properties of zno films grown by pulsed laser deposition[J]. Rare metals,2006,25(2):161-165. |
| APA | He, JT,Zhuang, HZ,Xue, CS,Wang, SY,Hu, LJ,&Xue, SB.(2006).Effect of substrate temperature on microstructural and optical properties of zno films grown by pulsed laser deposition.Rare metals,25(2),161-165. |
| MLA | He, JT,et al."Effect of substrate temperature on microstructural and optical properties of zno films grown by pulsed laser deposition".Rare metals 25.2(2006):161-165. |
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来源：半导体研究所
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