中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Study on in-plane optical anisotropy of semiconductor materials by reflectance difference spectroscopy

文献类型:期刊论文

作者Zhao Lei; Chen Yong-hai; Zuo Yu-hua; Wang Hai-ning; Shi Wen-hua
刊名Spectroscopy and spectral analysis
出版日期2006-07-01
卷号26期号:7页码:1185-1189
关键词Reflectance difference spectroscopy Semiconductor In-plane optical anisotropy Electrooptic modification
ISSN号1000-0593
通讯作者Zhao lei()
英文摘要In the present review, the measuring principle of reflectance difference spectroscopy (rds) is given. as a powerful tool in the surface and interface analysis technologies, the application of rds to the research on semiconductor materials is summarized. along with the origins of the in-plane optical anisotropy of semiconductors. and it is believed that rds will play an important role in the electrooptic modification of si-based semiconductor materials.
WOS关键词SURFACE ; INTERFACE ; GROWTH
WOS研究方向Spectroscopy
WOS类目Spectroscopy
语种英语
WOS记录号WOS:000239717100001
出版者BEIJING UNIV PRESS
URI标识http://www.irgrid.ac.cn/handle/1471x/2426865
专题半导体研究所
通讯作者Zhao Lei
作者单位1.Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
2.Chinese Acad Sci, Inst Semicond, State Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
3.Chinese Acad Sci, Inst Elect, State Key Lab Sensing Tech, Beijing 100080, Peoples R China
推荐引用方式
GB/T 7714
Zhao Lei,Chen Yong-hai,Zuo Yu-hua,et al. Study on in-plane optical anisotropy of semiconductor materials by reflectance difference spectroscopy[J]. Spectroscopy and spectral analysis,2006,26(7):1185-1189.
APA Zhao Lei,Chen Yong-hai,Zuo Yu-hua,Wang Hai-ning,&Shi Wen-hua.(2006).Study on in-plane optical anisotropy of semiconductor materials by reflectance difference spectroscopy.Spectroscopy and spectral analysis,26(7),1185-1189.
MLA Zhao Lei,et al."Study on in-plane optical anisotropy of semiconductor materials by reflectance difference spectroscopy".Spectroscopy and spectral analysis 26.7(2006):1185-1189.

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来源:半导体研究所

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