Inductively coupled plasma etching of two-dimensional inp/ingaasp-based photonic crystal
文献类型：期刊论文
| 作者 | Ma Xiao-Tao; Zheng Wan-Hua; Ren Gang; Fan Zhong-Chao; Chen Chang-Hui |
| 刊名 | Acta physica sinica
 |
| 出版日期 | 2007-02-01 |
| 卷号 | 56期号:2页码:977-981 |
| 关键词 | Two-dimensional photonic crystal Inp/ingaasp Inductively coupled plasma C-2/bcl3 Low bias etching |
| ISSN号 | 1000-3290 |
| 通讯作者 | Zheng wan-hua(whzheng@red.semi.ac.cn) |
| 英文摘要 | Inductively coupled plasma (icp) etching of inp in cl-2/bcl3 gas mixtures is studied in order to achieve low-damage and high-anisotropy etching of two-dimensional inp/ingaasp photonic crystal. the etching mechanisms are discussed and the effect of plasma heating on wafer during etching is analyzed. it is shown that the balance between the undercut originating from plasma heating and the redeposition of sputtering on the side-wall is crucial for highly anisotropic etching, and the balance point moves toward lower bias when the icp power is increased. high aspect-ratio etching at the dc bias of 203 v is obtained. eventually, photonic crystal structure with nearly 90 degrees side-wall is achieved at low dc bias after optimization of the gas mixture. |
| WOS关键词 | BORON-TRICHLORIDE ; CHLORINE ; DENSITY ; SMOOTH |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000243986600058 |
| 出版者 | CHINESE PHYSICAL SOC |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426929 |
| 专题 | 半导体研究所 |
| 通讯作者 | Zheng Wan-Hua |
| 作者单位 | 1.Chinese Acad Sci, Inst Semicond, Nanooptoelect Lab, Beijing 100083, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Engn Res Ctr Semicond Integrated Technol, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Ma Xiao-Tao,Zheng Wan-Hua,Ren Gang,et al. Inductively coupled plasma etching of two-dimensional inp/ingaasp-based photonic crystal[J]. Acta physica sinica,2007,56(2):977-981. |
| APA | Ma Xiao-Tao,Zheng Wan-Hua,Ren Gang,Fan Zhong-Chao,&Chen Chang-Hui.(2007).Inductively coupled plasma etching of two-dimensional inp/ingaasp-based photonic crystal.Acta physica sinica,56(2),977-981. |
| MLA | Ma Xiao-Tao,et al."Inductively coupled plasma etching of two-dimensional inp/ingaasp-based photonic crystal".Acta physica sinica 56.2(2007):977-981. |
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来源：半导体研究所
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