Structural and optical properties of zno thin films on glass substrate grown by laser-ablating zn target in oxygen atmosphere
文献类型:期刊论文
作者 | Zhu, B. L.; Zhao, X. Z.; Su, F. H.; Li, G. H.; Wu, X. G.; Wu, J.; Wu, R.; Liu, J. |
刊名 | Physica b-condensed matter
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出版日期 | 2007-06-15 |
卷号 | 396期号:1-2页码:95-101 |
关键词 | Zno Pulsed-laser deposition (pld) Optical properties Deposition process |
ISSN号 | 0921-4526 |
DOI | 10.1016/j.physb.2007.03.018 |
通讯作者 | Zhu, b. l.(zhubailin97@hotmail.com) |
英文摘要 | C-axis-orientated zno thin films were prepared on glass substrates by pulsed-laser deposition (pld) technique in an oxygen-reactive atmosphere, using a metallic zn target. the effects of growth condition such as laser energy and substrate temperature on the structural and optical properties of zno films had been investigated by x-ray diffraction (xrd), scanning electron microscopy (sem), transmission spectra and room-temperature (rt) photoluminescence (pl) measurements. the results showed that the thickness, crystallite size, and compactness of zno films increased with the laser energy and substrate temperature. both the absorption edges and the uv emission peaks of the films exhibited redshift, and uv emission intensity gradually increased as the laser energy and substrate temperature increased. from these results, it was concluded that crystalline quality of zno films was improved with increasing laser energy and substrate temperature. (c) 2007 elsevier b.n. all rights reserved. |
WOS关键词 | AMORPHOUS OXIDE SEMICONDUCTORS ; WAVE-GUIDING FILMS ; PHOTOLUMINESCENCE PROPERTIES ; REACTIVE ABLATION ; DEPOSITION ; TEMPERATURE ; THICKNESS ; SI(111) ; PLD ; FABRICATION |
WOS研究方向 | Physics |
WOS类目 | Physics, Condensed Matter |
语种 | 英语 |
WOS记录号 | WOS:000247506500017 |
出版者 | ELSEVIER SCIENCE BV |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426978 |
专题 | 半导体研究所 |
通讯作者 | Zhu, B. L. |
作者单位 | 1.Wuhan Univ Sci & Technol, Key Lab Hubei Prov Ceram & Refractories, Wuhan 430081, Peoples R China 2.Wuhan Univ, Dept Phys, Wuhan 430072, Peoples R China 3.Chinese Acad Sci, Inst Semicond, Natl Lab Superlattices & Microstruct, Beijing 100083, Peoples R China 4.Wuhan Univ Sci & Technol, Nanomat Ctr, Wuhan 430081, Peoples R China |
推荐引用方式 GB/T 7714 | Zhu, B. L.,Zhao, X. Z.,Su, F. H.,et al. Structural and optical properties of zno thin films on glass substrate grown by laser-ablating zn target in oxygen atmosphere[J]. Physica b-condensed matter,2007,396(1-2):95-101. |
APA | Zhu, B. L..,Zhao, X. Z..,Su, F. H..,Li, G. H..,Wu, X. G..,...&Liu, J..(2007).Structural and optical properties of zno thin films on glass substrate grown by laser-ablating zn target in oxygen atmosphere.Physica b-condensed matter,396(1-2),95-101. |
MLA | Zhu, B. L.,et al."Structural and optical properties of zno thin films on glass substrate grown by laser-ablating zn target in oxygen atmosphere".Physica b-condensed matter 396.1-2(2007):95-101. |
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来源:半导体研究所
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