A novel implantable multichannel silicon-based microelectrode
文献类型：期刊论文
| 作者 | Sui Xiao-Hong; Zhang Ruo-Xin; Pei Wei-Hua; Chen Hong-Da |
| 刊名 | Chinese physics
 |
| 出版日期 | 2007-07-01 |
| 卷号 | 16期号:7页码:2116-2119 |
| 关键词 | Mems Extracellular recording Microelectrode |
| ISSN号 | 1009-1963 |
| 通讯作者 | Sui xiao-hong(xhsui@mail.semi.ac.cn) |
| 英文摘要 | Silicon-based microelectrodes have been confirmed to be helpful in neural prostheses. the fabricated 7-channel silicon-based microelectrode was feasible to be implanted into the brain cortex. the manufacturing process by microelectromechanical system (mems) technology was detailed with four photolithographic masks. the microscopic photographs and sem images indicated that the probe shank was 3mm long, 100 mu m wide and 20 mu m thick with the recording sites spaced 120 mu m apart for good signal isolation. to facilitate the insertion and minimize the trauma, the microelectrode is narrowed down gradually near the tip with the tip taper angle of 6 degrees. curve of the single recording site impedance versus frequency was shown by test in vitro and the impedance declined from 150.5 k omega to 6.0 k omega with frequency changing from 10 k to 10mhz. |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000247897000053 |
| 出版者 | IOP PUBLISHING LTD |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427077 |
| 专题 | 半导体研究所 |
| 通讯作者 | Sui Xiao-Hong |
| 作者单位 | Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Sui Xiao-Hong,Zhang Ruo-Xin,Pei Wei-Hua,et al. A novel implantable multichannel silicon-based microelectrode[J]. Chinese physics,2007,16(7):2116-2119. |
| APA | Sui Xiao-Hong,Zhang Ruo-Xin,Pei Wei-Hua,&Chen Hong-Da.(2007).A novel implantable multichannel silicon-based microelectrode.Chinese physics,16(7),2116-2119. |
| MLA | Sui Xiao-Hong,et al."A novel implantable multichannel silicon-based microelectrode".Chinese physics 16.7(2007):2116-2119. |
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来源：半导体研究所
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