中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Morphological and electrical properties of inp grown by solid source molecular beam epitaxy

文献类型:期刊论文

作者Pi, Biao; Shu, Yongchun; Lin, Yaowang; Sun, Jiaming; Qu, Shengchun; Yao, Jianghong; Xing, Xiaodong; Xu, Bo; Shu, Qiang; Wang, Zhanguo
刊名Journal of crystal growth
出版日期2007-02-15
卷号299期号:2页码:243-247
ISSN号0022-0248
关键词Electron concentration High electron mobility Surface morphology Inp epilayer Molecular beam epitaxy
DOI10.1016/j.jcrysgro.2006.11.219
通讯作者Pi, biao(pib@tedamail.nankai.edu.cn)
英文摘要The properties of inp grown by solid source molecular beam epitaxy have been studied concerning electron mobility in correlation with surface morphology and carrier concentration. the surface roughness and carrier concentration exhibit pronounced dependences on growth temperature and v/iii flux ratio. a growth regime for a smooth surface and a high electron mobility is determined with growth temperature from 364-390 degrees c and v/iii flux ratio from 2.4 to 3.5. a inp film with maximum electron mobility of 4.57 x 10(4) cm(2)/v s at 77 k has been achieved. (c) 2006 elsevier b.v. all rights reserved.
WOS关键词SURFACE-MORPHOLOGY ; LOW-TEMPERATURE ; GAAS(110) ; EVOLUTION ; LASERS
WOS研究方向Crystallography ; Materials Science ; Physics
WOS类目Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied
语种英语
出版者ELSEVIER SCIENCE BV
WOS记录号WOS:000244833100002
URI标识http://www.irgrid.ac.cn/handle/1471x/2427146
专题半导体研究所
通讯作者Pi, Biao
作者单位1.Nankai Univ, Appl Phys Sch, TEDA,Minist Educ, Key Lab Adv Tech & Fabricat Weak Light Nonlinear, Tianjin 300457, Peoples R China
2.Chinese Acad Sci, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Pi, Biao,Shu, Yongchun,Lin, Yaowang,et al. Morphological and electrical properties of inp grown by solid source molecular beam epitaxy[J]. Journal of crystal growth,2007,299(2):243-247.
APA Pi, Biao.,Shu, Yongchun.,Lin, Yaowang.,Sun, Jiaming.,Qu, Shengchun.,...&Xu, Jingjun.(2007).Morphological and electrical properties of inp grown by solid source molecular beam epitaxy.Journal of crystal growth,299(2),243-247.
MLA Pi, Biao,et al."Morphological and electrical properties of inp grown by solid source molecular beam epitaxy".Journal of crystal growth 299.2(2007):243-247.

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来源:半导体研究所

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