Effect of temperature on structural and morphologic properties of zno films annealed in ammonia ambient
文献类型：期刊论文
| 作者 | Xue, Shoubin; Zhuang, Huizhao; Xue, Chengshan; Hu, Lijun; Li, Baoli; Zhang, Shiying |
| 刊名 | Journal of electronic materials
 |
| 出版日期 | 2007-04-01 |
| 卷号 | 36期号:4页码:502-506 |
| 关键词 | Zno films Pulsed laser deposition (pld) Nh3 ambient Anneal |
| ISSN号 | 0361-5235 |
| DOI | 10.1007/s11664-006-0042-z |
| 通讯作者 | Xue, shoubin() |
| 英文摘要 | Zno thin films were prepared on si(111) substrates by pulsed laser deposition (pld). then, the samples were annealed at different temperatures in nh3 ambient and their properties were investigated particularly as a function of annealing temperature. the structure, morphology, and optical properties of zno films were studied by x-ray diffraction (xrd), fourier transform infrared spectroscope (ftir), scanning electron microscope (sem), and photoluminescence (pl). the results show that the increase of annealing temperature makes for the improvement in the crystal quality and surface morphology below the temperature of 650 degrees c. however, when the annealing temperature is above 650 degrees c, the zno films will volatilize and, especially at 750 degrees c, zno will volatilize completely. |
| WOS关键词 | PULSED-LASER DEPOSITION ; THIN-FILMS ; OPTICAL-PROPERTIES ; ROOM-TEMPERATURE ; OXIDE-FILMS ; GROWTH ; CARBON |
| WOS研究方向 | Engineering ; Materials Science ; Physics |
| WOS类目 | Engineering, Electrical & Electronic ; Materials Science, Multidisciplinary ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000246861600039 |
| 出版者 | MINERALS METALS MATERIALS SOC |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427147 |
| 专题 | 半导体研究所 |
| 通讯作者 | Xue, Shoubin |
| 作者单位 | Shandong Normal Univ, Inst Semicond, Jinan 250014, Peoples R China |
| 推荐引用方式 GB/T 7714 | Xue, Shoubin,Zhuang, Huizhao,Xue, Chengshan,et al. Effect of temperature on structural and morphologic properties of zno films annealed in ammonia ambient[J]. Journal of electronic materials,2007,36(4):502-506. |
| APA | Xue, Shoubin,Zhuang, Huizhao,Xue, Chengshan,Hu, Lijun,Li, Baoli,&Zhang, Shiying.(2007).Effect of temperature on structural and morphologic properties of zno films annealed in ammonia ambient.Journal of electronic materials,36(4),502-506. |
| MLA | Xue, Shoubin,et al."Effect of temperature on structural and morphologic properties of zno films annealed in ammonia ambient".Journal of electronic materials 36.4(2007):502-506. |
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来源：半导体研究所
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