Design, fabrication, and characterization of an ultracompact low-loss photonic crystal corner mirror
文献类型：期刊论文
| 作者 | Yu, Hejun; Yu, Jinzhong; Yu, Yude; Fan, Zhong-Chao; Chen, Shaowu |
| 刊名 | Ieee journal of quantum electronics
 |
| 出版日期 | 2007-09-01 |
| 卷号 | 43期号:9-10页码:876-883 |
| 关键词 | Corner mirror Electron-beam lithography (ebl) Photonic crystal (pc) Reflector Silicon-on-insulator (soi) |
| ISSN号 | 0018-9197 |
| DOI | 10.1109/jqe.2007.904307 |
| 通讯作者 | Yu, hejun(yhjun@red.semi.ac.cn) |
| 英文摘要 | An ultracompact, low-loss, and broad-band corner mirror, based on photonic crystals, is investigated in this paper. based on the theoretical analysis of the loss mechanism, the boundary layers of the photonic crystal region are revised to improve the extra losses, and the transmission characteristics are evaluated by using the 3-d finite-difference time-domain method. the device with optimized structure was fabricated on silicon-on-insulator substrate by using electron-beam lithography and inductively coupled plasma etching. the measured extra losses are about 1.1 +/- 0.4 db per corner mirror for transverse-electronic polarization for the scanning wavelength range of 1510-1630 nm. dimensions of the achieved pc corner mirror are less than ;7 x 7 mu m(2), which are only about one tenth of conventional wave-guide corner mirrors. |
| WOS关键词 | SILICON-ON-INSULATOR ; WAVE-GUIDE ; LIGHT-PROPAGATION ; DEVICES ; BEND |
| WOS研究方向 | Engineering ; Optics ; Physics |
| WOS类目 | Engineering, Electrical & Electronic ; Optics ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000250097200019 |
| 出版者 | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427153 |
| 专题 | 半导体研究所 |
| 通讯作者 | Yu, Hejun |
| 作者单位 | Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yu, Hejun,Yu, Jinzhong,Yu, Yude,et al. Design, fabrication, and characterization of an ultracompact low-loss photonic crystal corner mirror[J]. Ieee journal of quantum electronics,2007,43(9-10):876-883. |
| APA | Yu, Hejun,Yu, Jinzhong,Yu, Yude,Fan, Zhong-Chao,&Chen, Shaowu.(2007).Design, fabrication, and characterization of an ultracompact low-loss photonic crystal corner mirror.Ieee journal of quantum electronics,43(9-10),876-883. |
| MLA | Yu, Hejun,et al."Design, fabrication, and characterization of an ultracompact low-loss photonic crystal corner mirror".Ieee journal of quantum electronics 43.9-10(2007):876-883. |
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来源：半导体研究所
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