中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Synthesis and properties of gan nanowires by rf magnetron sputtering

文献类型:期刊论文

作者Zhuang Huizhao1; Xue Shoubin2
刊名Chinese journal of physics
出版日期2008-04-01
卷号46期号:2页码:163-169
ISSN号0577-9073
通讯作者Zhuang huizhao()
英文摘要Gan nanowires have been successfully synthesized on si(111) substrates using magnetron sputtering by ammoniating the ga(2)o(3)/zno films at 950 degrees in a quartz tube. the gan nanowires have been characterized by x-ray diffraction (xrd), scanning electron microscopy (sem), field-emission transmission electron microscopy (fetem), x-ray photoelectron spectroscopy (xps), and photoluminescence. the representative photoluminescence spectrum exhibits a strong emission peak at 375.7 nm, and two weak emission peaks at 434.8 nm and 472.9 nm. the results show that the gan nanowires have a single-crystal hexagonal wurtzite structure with a length of about several micrometers and diameters ranging from 60 nm to 160 nm, which is suitable for applications to nanodevices.
WOS关键词GALLIUM NITRIDE ; GROWTH ; DEPOSITION ; NANORODS ; FILMS ; CARBON
WOS研究方向Physics
WOS类目Physics, Multidisciplinary
语种英语
WOS记录号WOS:000257408800006
出版者PHYSICAL SOC REPUBLIC CHINA
URI标识http://www.irgrid.ac.cn/handle/1471x/2427246
专题半导体研究所
通讯作者Zhuang Huizhao
作者单位1.Shandong Normal Univ, Inst Semicond, Jinan 250014, Peoples R China
2.Peking Univ, Inst Microelect, Beijing 100871, Peoples R China
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Zhuang Huizhao,Xue Shoubin. Synthesis and properties of gan nanowires by rf magnetron sputtering[J]. Chinese journal of physics,2008,46(2):163-169.
APA Zhuang Huizhao,&Xue Shoubin.(2008).Synthesis and properties of gan nanowires by rf magnetron sputtering.Chinese journal of physics,46(2),163-169.
MLA Zhuang Huizhao,et al."Synthesis and properties of gan nanowires by rf magnetron sputtering".Chinese journal of physics 46.2(2008):163-169.

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来源:半导体研究所

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