Planar refractive microlens arrays in indium phosphide and quartz substrates
文献类型：期刊论文
| 作者 | Zhang, Xinyu1,2; Xie, Changsheng2; Ji, An3; Tang, Qingle4; Luo, Wei5 |
| 刊名 | Optical engineering
 |
| 出版日期 | 2008-05-01 |
| 卷号 | 47期号:5页码:15 |
| 关键词 | Concave refractive microlens array Planar refractive microlens array Ion beam etching |
| ISSN号 | 0091-3286 |
| DOI | 10.1117/1.2931076 |
| 通讯作者 | Zhang, xinyu(x_yzhang@yahoo.com.cn) |
| 英文摘要 | Large-area concave refractive microlens arrays, or concave template structures, and then the non-refractive-index-gradient type of planar refractive microlens arrays in inp and quartz substrates, are fabricated utilizing the method consisting of conventional uv photolithography, thermal shaping of concave photoresist microlenses, etching with an argon ion beam of large diameter, and filling or growing optical medium structures onto the curved surfaces of preshaped concave templates. several key conditions for fabricating concave and also planar microlenses are discussed in detail. the concave structures obtained are characterized by scanning electron microscope and surface profile measurements. the far-field optical characteristics of quartz/zro(2) planar refractive microlens arrays have been acquired experimentally. (c) 2008 society of photo-optical instrumentation engineers. |
| WOS关键词 | ION-EXCHANGE ; LENS ARRAYS |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000257227100015 |
| 出版者 | SPIE-SOC PHOTOPTICAL INSTRUMENTATION ENGINEERS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427268 |
| 专题 | 半导体研究所 |
| 通讯作者 | Zhang, Xinyu |
| 作者单位 | 1.Huazhong Univ Sci & Technol, State Key Lab Multispectral Informat Proc Technol, Wuhan 430074, Hubei Province, Peoples R China 2.Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Hubei Province, Peoples R China 3.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China 4.Huazhong Res Inst Electropt Technol, Wuhan 430074, Hubei Province, Peoples R China 5.Jiangxi Inst Elect Commun Technol, Nanchang 330029, Jiangxi, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Xinyu,Xie, Changsheng,Ji, An,et al. Planar refractive microlens arrays in indium phosphide and quartz substrates[J]. Optical engineering,2008,47(5):15. |
| APA | Zhang, Xinyu,Xie, Changsheng,Ji, An,Tang, Qingle,&Luo, Wei.(2008).Planar refractive microlens arrays in indium phosphide and quartz substrates.Optical engineering,47(5),15. |
| MLA | Zhang, Xinyu,et al."Planar refractive microlens arrays in indium phosphide and quartz substrates".Optical engineering 47.5(2008):15. |
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来源：半导体研究所
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