Growth of c-oriented zno films on (001) smo3 substrates by mocvd
文献类型：期刊论文
| 作者 | Jia, Caihong; Chen, Yonghai; Liu, Genhua; Liu, Xianglin; Yang, Shaoyan; Wang, Zhanguo |
| 刊名 | Journal of crystal growth
 |
| 出版日期 | 2008-12-15 |
| 卷号 | 311期号:1页码:200-204 |
| 关键词 | Growth behavior Srtio3 Mocvd Zno |
| ISSN号 | 0022-0248 |
| DOI | 10.1016/j.jcrysgro.2008.10.017 |
| 通讯作者 | Chen, yonghai(yhchen@red.semi.ac.cn) |
| 英文摘要 | The growth direction of zno thin films grown by metal-organic chemical vapor deposition (mocvd) is modulated by pretreatment of (001) smo3 (sto) substrates. zno films show a-oriented smooth surface with epitaxial relationship of < 001 > zno//< 110 > sto on as-received sfo, and c-axis columnar growth with < 010 > zno//< 110 > sto on etched sto, respectively. the orientation alteration of zno films is supposed to be caused by the change of sto surface polarity. in addition, the c-zno films exhibit an enhanced photoluminescence (pl) intensity due to the improved crystal quality, while the blueshift of pl peak is attributed to the smaller tensile strain. these results show that high quality c-zno, which is essential for electronic and optoelectronic device applications, can be grown on (001) sfo by mocvd. (c) 2008 elsevier b.v. all rights reserved. |
| WOS关键词 | CHEMICAL-VAPOR-DEPOSITION ; MOLECULAR-BEAM EPITAXY ; THIN-FILMS ; OPTICAL-PROPERTIES ; ROOM-TEMPERATURE ; INITIAL-STAGE ; SAPPHIRE ; SURFACE ; STRAIN |
| WOS研究方向 | Crystallography ; Materials Science ; Physics |
| WOS类目 | Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000262796500038 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427281 |
| 专题 | 半导体研究所 |
| 通讯作者 | Chen, Yonghai |
| 作者单位 | Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Jia, Caihong,Chen, Yonghai,Liu, Genhua,et al. Growth of c-oriented zno films on (001) smo3 substrates by mocvd[J]. Journal of crystal growth,2008,311(1):200-204. |
| APA | Jia, Caihong,Chen, Yonghai,Liu, Genhua,Liu, Xianglin,Yang, Shaoyan,&Wang, Zhanguo.(2008).Growth of c-oriented zno films on (001) smo3 substrates by mocvd.Journal of crystal growth,311(1),200-204. |
| MLA | Jia, Caihong,et al."Growth of c-oriented zno films on (001) smo3 substrates by mocvd".Journal of crystal growth 311.1(2008):200-204. |
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来源：半导体研究所
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