Design, fabrication and characterization of a high-performance microring resonator in silicon-on-insulator
文献类型：期刊论文
| 作者 | Huang Qing-Zhong; Yu Jin-Zhong; Chen Shao-Wu; Xu Xue-Jun; Han Wei-Hua; Fan Zhong-Chao |
| 刊名 | Chinese physics b
 |
| 出版日期 | 2008-07-01 |
| 卷号 | 17期号:7页码:2562-2566 |
| 关键词 | Integrated photonics Microring resonator Quality factor Silicon-on-insulator |
| ISSN号 | 1674-1056 |
| 通讯作者 | Huang qing-zhong() |
| 英文摘要 | A high-performance microring resonator in a silicon-on-insulator rib waveguide is realized by using the electron beam lithography followed by inductively coupled plasma etching. the design and the experimental realization of this device are presented in detail. in addition to improving relevant processes to minimize propagation loss, the coupling efficiency between the ring and the bus is carefully chosen to approach a critical coupling for high performance operating. we have measured a quality factor of 21,200 and an extinction ratio of 12.5db at a resonant wavelength of 1549.32nm. meanwhile, a low propagation loss of 0.89db/mm in a curved waveguide with a bending radius of 40 mu m is demonstrated as well. |
| WOS关键词 | WAVE-GUIDES ; MICRORESONATORS ; FILTERS ; MODE |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000257843000037 |
| 出版者 | IOP PUBLISHING LTD |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427301 |
| 专题 | 半导体研究所 |
| 通讯作者 | Huang Qing-Zhong |
| 作者单位 | Chinese Acad Sci, Inst Semicond, Natl Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Huang Qing-Zhong,Yu Jin-Zhong,Chen Shao-Wu,et al. Design, fabrication and characterization of a high-performance microring resonator in silicon-on-insulator[J]. Chinese physics b,2008,17(7):2562-2566. |
| APA | Huang Qing-Zhong,Yu Jin-Zhong,Chen Shao-Wu,Xu Xue-Jun,Han Wei-Hua,&Fan Zhong-Chao.(2008).Design, fabrication and characterization of a high-performance microring resonator in silicon-on-insulator.Chinese physics b,17(7),2562-2566. |
| MLA | Huang Qing-Zhong,et al."Design, fabrication and characterization of a high-performance microring resonator in silicon-on-insulator".Chinese physics b 17.7(2008):2562-2566. |
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来源：半导体研究所
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