中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Simulation demonstration and experimental fabrication of a multiple-slot waveguide

文献类型:期刊论文

作者Tu, Xiaoguang; Xu, Xuejun; Chen, Shaowu; Yu, Jinzhong; Wang, Qiming
刊名Ieee photonics technology letters
出版日期2008-03-01
卷号20期号:5-8页码:333-335
关键词Dielectric waveguides Silicon-on-insulator technology
ISSN号1041-1135
DOI10.1109/lpt.2007.915619
通讯作者Tu, xiaoguang(tuxiaog@red.semi.ac.cn)
英文摘要A multiple-slot waveguide is presented and demonstrated through theoretical simulation. taking a double-slot waveguide as an example, the results show a nearly 30% enhancement of optical intensity compared with the traditional single-slot waveguide with the same slot gap width. therefore, the e-field intensity of the slot can be increased by adding another smaller slot. a double-slot waveguide with oxide and air as low index slot materials is realized experimentally and the formation processes of the slots are analyzed.
WOS关键词LIGHT
WOS研究方向Engineering ; Optics ; Physics
WOS类目Engineering, Electrical & Electronic ; Optics ; Physics, Applied
语种英语
WOS记录号WOS:000257952800003
出版者IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
URI标识http://www.irgrid.ac.cn/handle/1471x/2427305
专题半导体研究所
通讯作者Tu, Xiaoguang
作者单位Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Tu, Xiaoguang,Xu, Xuejun,Chen, Shaowu,et al. Simulation demonstration and experimental fabrication of a multiple-slot waveguide[J]. Ieee photonics technology letters,2008,20(5-8):333-335.
APA Tu, Xiaoguang,Xu, Xuejun,Chen, Shaowu,Yu, Jinzhong,&Wang, Qiming.(2008).Simulation demonstration and experimental fabrication of a multiple-slot waveguide.Ieee photonics technology letters,20(5-8),333-335.
MLA Tu, Xiaoguang,et al."Simulation demonstration and experimental fabrication of a multiple-slot waveguide".Ieee photonics technology letters 20.5-8(2008):333-335.

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来源:半导体研究所

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