Oxygen pressure dependences of structure and properties of zno films deposited on amorphous glass substrates by pulsed laser deposition
文献类型:期刊论文
作者 | Zhu, Bai Lin1,2; Zhao, Xing Zhong3; Xu, Sheng3; Su, Fu Hai4; Li, Guo Hua4; Wu, Xiao Guang4; Wu, Jun1,2; Wu, Run1,2; Liu, Jing1,2 |
刊名 | Japanese journal of applied physics
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出版日期 | 2008-04-01 |
卷号 | 47期号:4页码:2225-2229 |
关键词 | Laser ablation Zinc oxide Deposition process Optical properties Electrical properties and measurements |
ISSN号 | 0021-4922 |
DOI | 10.1143/jjap.47.2225 |
通讯作者 | Zhu, bai lin(zhubailin97@hotmail.com) |
英文摘要 | Zno films are prepared on glass substrates by pulsed laser deposition (pld) at different oxygen pressures, and the effects of oxygen pressure on the structure and optoelectrical properties of as-grown zno films are investigated. the results show that the crystallite size and surface roughness of the films increase, but the carrier concentration and optical energy gap e(g) decrease with increasing oxygen pressure. only uv emission is found in the photoluminescence (pl) spectra of all the samples, and its intensity increases with oxygen pressure. furthermore, there are marked differences in structure and properties between the films grown at low oxygen pressures (0.003 and 0.2 pa) and the films grown at high oxygen pressures (24 and 150 pa), which is confirmed by the fact that the crystallite size and uv emission intensity markedly increase, but the carrier concentration markedly decreases as oxygen pressure increases from 0.2 to 24 pa. these results show that the crystal quality, including the microstructural quality and stoichiometry proportion, of the prepared zno films improves as oxygen pressure increases, particularly from 0.2 to 24 pa. |
WOS关键词 | THIN-FILMS ; ELECTRICAL-PROPERTIES ; OPTICAL-PROPERTIES ; TRANSPARENT ; PHOTOLUMINESCENCE ; DEVICES ; LUMINESCENCE ; TEMPERATURE ; THICKNESS ; SAPPHIRE |
WOS研究方向 | Physics |
WOS类目 | Physics, Applied |
语种 | 英语 |
WOS记录号 | WOS:000255449000071 |
出版者 | JAPAN SOCIETY APPLIED PHYSICS |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427309 |
专题 | 半导体研究所 |
通讯作者 | Zhu, Bai Lin |
作者单位 | 1.Wuhan Univ Sci & Technol, Key Lab Hubei Province Ceram, Wuhan 430081, Peoples R China 2.Wuhan Univ Sci & Technol, Refractor Nanomat Ctr, Wuhan 430081, Peoples R China 3.Wuhan Univ, Dept Phys, Wuhan 430072, Peoples R China 4.Chinese Acad Sci, Inst Semicond, Natl Lab Superlattices & Microstruct, Beijing 100083, Peoples R China |
推荐引用方式 GB/T 7714 | Zhu, Bai Lin,Zhao, Xing Zhong,Xu, Sheng,et al. Oxygen pressure dependences of structure and properties of zno films deposited on amorphous glass substrates by pulsed laser deposition[J]. Japanese journal of applied physics,2008,47(4):2225-2229. |
APA | Zhu, Bai Lin.,Zhao, Xing Zhong.,Xu, Sheng.,Su, Fu Hai.,Li, Guo Hua.,...&Liu, Jing.(2008).Oxygen pressure dependences of structure and properties of zno films deposited on amorphous glass substrates by pulsed laser deposition.Japanese journal of applied physics,47(4),2225-2229. |
MLA | Zhu, Bai Lin,et al."Oxygen pressure dependences of structure and properties of zno films deposited on amorphous glass substrates by pulsed laser deposition".Japanese journal of applied physics 47.4(2008):2225-2229. |
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来源:半导体研究所
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