中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Oxygen pressure dependences of structure and properties of zno films deposited on amorphous glass substrates by pulsed laser deposition

文献类型:期刊论文

作者Zhu, Bai Lin1,2; Zhao, Xing Zhong3; Xu, Sheng3; Su, Fu Hai4; Li, Guo Hua4; Wu, Xiao Guang4; Wu, Jun1,2; Wu, Run1,2; Liu, Jing1,2
刊名Japanese journal of applied physics
出版日期2008-04-01
卷号47期号:4页码:2225-2229
关键词Laser ablation Zinc oxide Deposition process Optical properties Electrical properties and measurements
ISSN号0021-4922
DOI10.1143/jjap.47.2225
通讯作者Zhu, bai lin(zhubailin97@hotmail.com)
英文摘要Zno films are prepared on glass substrates by pulsed laser deposition (pld) at different oxygen pressures, and the effects of oxygen pressure on the structure and optoelectrical properties of as-grown zno films are investigated. the results show that the crystallite size and surface roughness of the films increase, but the carrier concentration and optical energy gap e(g) decrease with increasing oxygen pressure. only uv emission is found in the photoluminescence (pl) spectra of all the samples, and its intensity increases with oxygen pressure. furthermore, there are marked differences in structure and properties between the films grown at low oxygen pressures (0.003 and 0.2 pa) and the films grown at high oxygen pressures (24 and 150 pa), which is confirmed by the fact that the crystallite size and uv emission intensity markedly increase, but the carrier concentration markedly decreases as oxygen pressure increases from 0.2 to 24 pa. these results show that the crystal quality, including the microstructural quality and stoichiometry proportion, of the prepared zno films improves as oxygen pressure increases, particularly from 0.2 to 24 pa.
WOS关键词THIN-FILMS ; ELECTRICAL-PROPERTIES ; OPTICAL-PROPERTIES ; TRANSPARENT ; PHOTOLUMINESCENCE ; DEVICES ; LUMINESCENCE ; TEMPERATURE ; THICKNESS ; SAPPHIRE
WOS研究方向Physics
WOS类目Physics, Applied
语种英语
WOS记录号WOS:000255449000071
出版者JAPAN SOCIETY APPLIED PHYSICS
URI标识http://www.irgrid.ac.cn/handle/1471x/2427309
专题半导体研究所
通讯作者Zhu, Bai Lin
作者单位1.Wuhan Univ Sci & Technol, Key Lab Hubei Province Ceram, Wuhan 430081, Peoples R China
2.Wuhan Univ Sci & Technol, Refractor Nanomat Ctr, Wuhan 430081, Peoples R China
3.Wuhan Univ, Dept Phys, Wuhan 430072, Peoples R China
4.Chinese Acad Sci, Inst Semicond, Natl Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Zhu, Bai Lin,Zhao, Xing Zhong,Xu, Sheng,et al. Oxygen pressure dependences of structure and properties of zno films deposited on amorphous glass substrates by pulsed laser deposition[J]. Japanese journal of applied physics,2008,47(4):2225-2229.
APA Zhu, Bai Lin.,Zhao, Xing Zhong.,Xu, Sheng.,Su, Fu Hai.,Li, Guo Hua.,...&Liu, Jing.(2008).Oxygen pressure dependences of structure and properties of zno films deposited on amorphous glass substrates by pulsed laser deposition.Japanese journal of applied physics,47(4),2225-2229.
MLA Zhu, Bai Lin,et al."Oxygen pressure dependences of structure and properties of zno films deposited on amorphous glass substrates by pulsed laser deposition".Japanese journal of applied physics 47.4(2008):2225-2229.

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来源:半导体研究所

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