Surface characteristics of sio2-tio2 strip fabricated by laser direct writing
文献类型：期刊论文
| 作者 | Li, Aikui1; Wang, Zemin1; Liu, Jiajun1; Zeng, Xiaoyan1; Wang, Chunxia2; Chen, Hongda2 |
| 刊名 | Chinese optics letters
 |
| 出版日期 | 2008-02-10 |
| 卷号 | 6期号:2页码:108-111 |
| ISSN号 | 1671-7694 |
| 通讯作者 | Li, aikui(liaikui@163.com) |
| 英文摘要 | Sio2-tio2 sol-gel films are deposited on sio2/si by dip-coating technique. the sio2-tio2 strips are fabricated by laser direct writing using all ytterbium fiber laser and followed by chemical etching. surface structures, morphologies and roughness of the films and strips are characterized. the experimental results demonstrate that the sio2-tio2 sol-gel film is loose in structure and a shrinkage concave groove forms if the film is irradiated by laser beam. the surface roughness of both non-irradiated and laser irradiated areas increases with the chemical etching time. but the roughness of laser irradiated area increases more than that of non-irradiated area under the same etching time. after being etched for 28 s, the surface roughness value of the laser irradiated area increases from 0.3 nm to 3.1 nm. |
| WOS关键词 | OPTICAL WAVE-GUIDES ; SOL-GEL METHOD ; FEMTOSECOND LASER ; FILMS ; COMPOSITE |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000266970300009 |
| 出版者 | CHINESE LASER PRESS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427349 |
| 专题 | 半导体研究所 |
| 通讯作者 | Li, Aikui |
| 作者单位 | 1.Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Peoples R China 2.Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li, Aikui,Wang, Zemin,Liu, Jiajun,et al. Surface characteristics of sio2-tio2 strip fabricated by laser direct writing[J]. Chinese optics letters,2008,6(2):108-111. |
| APA | Li, Aikui,Wang, Zemin,Liu, Jiajun,Zeng, Xiaoyan,Wang, Chunxia,&Chen, Hongda.(2008).Surface characteristics of sio2-tio2 strip fabricated by laser direct writing.Chinese optics letters,6(2),108-111. |
| MLA | Li, Aikui,et al."Surface characteristics of sio2-tio2 strip fabricated by laser direct writing".Chinese optics letters 6.2(2008):108-111. |
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来源：半导体研究所
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