中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Recent progresses of si-based photonics in chinese main land

文献类型:期刊论文

作者Yu, Jinzhong; Wang, Qiming; Chenw, Buwen; Chen, Saowu; Zuo, Yuhua
刊名Ieice transactions on electronics
出版日期2008-02-01
卷号E91c期号:2页码:150-155
关键词Nanoctystals Pl Quantum dot Soi Optical switch matrix Photodiodes
ISSN号0916-8524
DOI10.1093/ietele/e91-c.2.150
通讯作者Yu, jinzhong(jzyu@red.semi.ac.cn)
英文摘要Si-based photonic materials and devices, including sige/si quantum structures, soi and ingaas bonded on si, pl of si nanocrystals, soi photonic crystal filter, si based rce (resonant cavity enhanced) photodiodes, soi to (thermai-optical) switch matrix were investigated in institute of serniconductors, chinese academy of sciences. the main results in recent years are presented in the paper. the mechanism of pl from si ncs embedded in sio2 matrix was studied, a greater contribution of the interface state recombination (pl peak in 850 similar to 900 nm) is associated with larger si ncs and higher interface state density. ge dots with density of order of 10(11) cm(-2) were obtained by uhv/cvd growth and 193 nm excimer laser annealing. soi photonic crystal filter with resonant wavelength of 1598 nm and q factor of 1140 was designed and made. si based hybrid ingaas rce pd with eta of 34.4% and fwhm of 27 nut were achieved by mocvd growth and bonding technology between ingaas epitaxial and si wafers. a 16x16 soi optical switch matrix were designed and made. a new current driving circuit was used to improve the response speed of a 4x4 soi rearrangeable nonblocking to switch matrix, rising and failing time is 970 and 750 ns, respectively.
WOS关键词WAVE-GUIDE SWITCH ; SILICON ; SOI ; FABRICATION ; MODULATOR ; MATRIX
WOS研究方向Engineering
WOS类目Engineering, Electrical & Electronic
语种英语
WOS记录号WOS:000253655400006
出版者IEICE-INST ELECTRONICS INFORMATION COMMUNICATIONS ENG
URI标识http://www.irgrid.ac.cn/handle/1471x/2427436
专题半导体研究所
通讯作者Yu, Jinzhong
作者单位Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Yu, Jinzhong,Wang, Qiming,Chenw, Buwen,et al. Recent progresses of si-based photonics in chinese main land[J]. Ieice transactions on electronics,2008,E91c(2):150-155.
APA Yu, Jinzhong,Wang, Qiming,Chenw, Buwen,Chen, Saowu,&Zuo, Yuhua.(2008).Recent progresses of si-based photonics in chinese main land.Ieice transactions on electronics,E91c(2),150-155.
MLA Yu, Jinzhong,et al."Recent progresses of si-based photonics in chinese main land".Ieice transactions on electronics E91c.2(2008):150-155.

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来源:半导体研究所

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