Recent progresses of si-based photonics in chinese main land
文献类型:期刊论文
作者 | Yu, Jinzhong; Wang, Qiming; Chenw, Buwen; Chen, Saowu; Zuo, Yuhua |
刊名 | Ieice transactions on electronics
![]() |
出版日期 | 2008-02-01 |
卷号 | E91c期号:2页码:150-155 |
关键词 | Nanoctystals Pl Quantum dot Soi Optical switch matrix Photodiodes |
ISSN号 | 0916-8524 |
DOI | 10.1093/ietele/e91-c.2.150 |
通讯作者 | Yu, jinzhong(jzyu@red.semi.ac.cn) |
英文摘要 | Si-based photonic materials and devices, including sige/si quantum structures, soi and ingaas bonded on si, pl of si nanocrystals, soi photonic crystal filter, si based rce (resonant cavity enhanced) photodiodes, soi to (thermai-optical) switch matrix were investigated in institute of serniconductors, chinese academy of sciences. the main results in recent years are presented in the paper. the mechanism of pl from si ncs embedded in sio2 matrix was studied, a greater contribution of the interface state recombination (pl peak in 850 similar to 900 nm) is associated with larger si ncs and higher interface state density. ge dots with density of order of 10(11) cm(-2) were obtained by uhv/cvd growth and 193 nm excimer laser annealing. soi photonic crystal filter with resonant wavelength of 1598 nm and q factor of 1140 was designed and made. si based hybrid ingaas rce pd with eta of 34.4% and fwhm of 27 nut were achieved by mocvd growth and bonding technology between ingaas epitaxial and si wafers. a 16x16 soi optical switch matrix were designed and made. a new current driving circuit was used to improve the response speed of a 4x4 soi rearrangeable nonblocking to switch matrix, rising and failing time is 970 and 750 ns, respectively. |
WOS关键词 | WAVE-GUIDE SWITCH ; SILICON ; SOI ; FABRICATION ; MODULATOR ; MATRIX |
WOS研究方向 | Engineering |
WOS类目 | Engineering, Electrical & Electronic |
语种 | 英语 |
WOS记录号 | WOS:000253655400006 |
出版者 | IEICE-INST ELECTRONICS INFORMATION COMMUNICATIONS ENG |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427436 |
专题 | 半导体研究所 |
通讯作者 | Yu, Jinzhong |
作者单位 | Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China |
推荐引用方式 GB/T 7714 | Yu, Jinzhong,Wang, Qiming,Chenw, Buwen,et al. Recent progresses of si-based photonics in chinese main land[J]. Ieice transactions on electronics,2008,E91c(2):150-155. |
APA | Yu, Jinzhong,Wang, Qiming,Chenw, Buwen,Chen, Saowu,&Zuo, Yuhua.(2008).Recent progresses of si-based photonics in chinese main land.Ieice transactions on electronics,E91c(2),150-155. |
MLA | Yu, Jinzhong,et al."Recent progresses of si-based photonics in chinese main land".Ieice transactions on electronics E91c.2(2008):150-155. |
入库方式: iSwitch采集
来源:半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。