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High al-content alingan epilayers with different thicknesses grown on gan/sapphire templates

文献类型:期刊论文

作者Shang, J. Z.1,2; Zhang, B. P.1,2; Wu, C. M.1,2; Cai, L. E.1,2; Zhang, J. Y.1,2,3; Yu, J. Z.1,2,3; Wang, Q. M.1,2,3
刊名Applied surface science
出版日期2008-12-30
卷号255期号:5页码:3350-3353
关键词Xps Pl Afm Composition pulling effect Alingan Mocvd
ISSN号0169-4332
DOI10.1016/j.apsusc.2008.09.046
通讯作者Zhang, b. p.(bzhang@xmu.edu.cn)
英文摘要We studied the structural and optical properties of high al-content alingan epilayers with different thicknesses grown on gan/sapphire templates by metalorganic chemical vapor deposition (mocvd). direct evidences of the gradual evolution of the content of al, ga and in along the growth direction were obtained. when the film thickness was over a certain value, however, the alingan epilayer with constant element contents began to form. these results were also supported by the blue shift and splitting of the photoluminescence (pl) peak. for the thinnest epilayer, the surface was featured with outcrops of threading dislocations (tds) which suggested a spiral growth mode. with increase in thickness, step-flow growth mode and v-shaped pits were observed, and the steps terminated at the pits. (c) 2008 elsevier b. v. all rights reserved.
WOS关键词SAPPHIRE SUBSTRATE ; QUANTUM-WELLS ; GAN TEMPLATES ; FILMS ; STRAIN ; RELAXATION ; DEFECTS ; ALGAN
WOS研究方向Chemistry ; Materials Science ; Physics
WOS类目Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
语种英语
WOS记录号WOS:000261299200135
出版者ELSEVIER SCIENCE BV
URI标识http://www.irgrid.ac.cn/handle/1471x/2427483
专题半导体研究所
通讯作者Zhang, B. P.
作者单位1.Xiamen Univ, Dept Phys, Xiamen 361005, Peoples R China
2.Xiamen Univ, Semicond Photon Res Ctr, Xiamen 361005, Peoples R China
3.Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Shang, J. Z.,Zhang, B. P.,Wu, C. M.,et al. High al-content alingan epilayers with different thicknesses grown on gan/sapphire templates[J]. Applied surface science,2008,255(5):3350-3353.
APA Shang, J. Z..,Zhang, B. P..,Wu, C. M..,Cai, L. E..,Zhang, J. Y..,...&Wang, Q. M..(2008).High al-content alingan epilayers with different thicknesses grown on gan/sapphire templates.Applied surface science,255(5),3350-3353.
MLA Shang, J. Z.,et al."High al-content alingan epilayers with different thicknesses grown on gan/sapphire templates".Applied surface science 255.5(2008):3350-3353.

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来源:半导体研究所

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