Growth-parameter spaces and optical properties of cubic boron nitride films on si(001)
文献类型：期刊论文
| 作者 | Fan Ya-Ming1; Zhang Xing-Wang1,2; You Jing-Bi1; Ying Jie1; Tan Hai-Ren1; Chen Nuo-Fu1 |
| 刊名 | Chinese physics letters
 |
| 出版日期 | 2009-05-01 |
| 卷号 | 26期号:5页码:4 |
| ISSN号 | 0256-307X |
| 通讯作者 | Zhang xing-wang(xwzhang@semi.ac.cn) |
| 英文摘要 | Cubic boron nitride (c-bn) films were deposited on si(001) substrates in an ion beam assisted deposition (ibad) system under various conditions, and the growth parameter spaces and optical properties of c-bn films have been investigated systematically. the results indicate that suitable ion bombardment is necessary for the growth of c-bn films, and a well defined parameter space can be established by using the p/a-parameter. the refractive index of bn films keeps a constant of 1.8 for the c-bn content lower than 50%, while for c-bn films with higher cubic phase the refractive index increases with the c-bn content from 1.8 at chi(c) = 50% to 2.1 at chi(c) = 90%. furthermore, the relationship between n and rho for bn films can be described by the anderson-schreiber equation, and the overlap field parameter gamma is determined to be 2.05. |
| WOS关键词 | BN THIN-FILMS ; REFRACTIVE-INDEX ; ELLIPSOMETRY ; NUCLEATION ; DIAMOND ; DENSITY |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000266074700051 |
| 出版者 | IOP PUBLISHING LTD |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427497 |
| 专题 | 半导体研究所 |
| 通讯作者 | Zhang Xing-Wang |
| 作者单位 | 1.Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China 2.Hubei Univ, Key Lab Ferroelect & Piezoelect Mat & Devices Hub, Wuhan 430062, Peoples R China |
| 推荐引用方式 GB/T 7714 | Fan Ya-Ming,Zhang Xing-Wang,You Jing-Bi,et al. Growth-parameter spaces and optical properties of cubic boron nitride films on si(001)[J]. Chinese physics letters,2009,26(5):4. |
| APA | Fan Ya-Ming,Zhang Xing-Wang,You Jing-Bi,Ying Jie,Tan Hai-Ren,&Chen Nuo-Fu.(2009).Growth-parameter spaces and optical properties of cubic boron nitride films on si(001).Chinese physics letters,26(5),4. |
| MLA | Fan Ya-Ming,et al."Growth-parameter spaces and optical properties of cubic boron nitride films on si(001)".Chinese physics letters 26.5(2009):4. |
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来源：半导体研究所
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