中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Silicon nanopore array structure using porous anodic alumina

文献类型:期刊论文

作者Bai An-Qi; Hu Di; Ding Wu-Chang; Su Shao-Jian; Hu Wei-Xuan; Xue Chun-Lai; Fan Zhong-Chao; Cheng Bu-Wen; Yu Yu-De; Wang Qi-Ming
刊名Acta physica sinica
出版日期2009-07-01
卷号58期号:7页码:4997-5001
关键词Porous anodic alumina mask Silicon nanopore array structure Pattern transfer
ISSN号1000-3290
通讯作者Cheng bu-wen(cbw@red.semi.ac.cn)
英文摘要A free-standing, bidirectionally permeable and ultra-thin (500-1000 nm) porous anodic alumina membrane was fabricated using a two-step aluminium anodization process, which was then placed on top of a silicon film as an etching mask. the pattern was transferred to silicon using dry-etching technology, and the silicon nanopore array structure was formed. the factors which afflct the pattern transfer process are discussed. observation of the nanopatterned sample under a scanning electron microscope shows that the structure obtained by this method is made up of uniform and highly ordered holes, which attains to 125 nm depth. the photoluminescence spectrum from the nanopatterned sample,the surface of which has been thermal-oxidized, shows that the the luminesce is evidently enhanced, the mechanism of which is based on the normally weak to phonon assisted bandgap light-emission process, and the physical reasons that underlic the enhancement have been analyzed. the pl results do show an attractive optical characteristic, which provides a promising pathway to achieve efficient light emission from silicon.
WOS关键词OPTICAL GAIN ; NANOCRYSTALS ; FABRICATION
WOS研究方向Physics
WOS类目Physics, Multidisciplinary
语种英语
WOS记录号WOS:000268263700098
出版者CHINESE PHYSICAL SOC
URI标识http://www.irgrid.ac.cn/handle/1471x/2427507
专题半导体研究所
通讯作者Cheng Bu-Wen
作者单位Chinese Acad Sci, State Key Lab Integrated Optoelect, Inst Semicond, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Bai An-Qi,Hu Di,Ding Wu-Chang,et al. Silicon nanopore array structure using porous anodic alumina[J]. Acta physica sinica,2009,58(7):4997-5001.
APA Bai An-Qi.,Hu Di.,Ding Wu-Chang.,Su Shao-Jian.,Hu Wei-Xuan.,...&Wang Qi-Ming.(2009).Silicon nanopore array structure using porous anodic alumina.Acta physica sinica,58(7),4997-5001.
MLA Bai An-Qi,et al."Silicon nanopore array structure using porous anodic alumina".Acta physica sinica 58.7(2009):4997-5001.

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来源:半导体研究所

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