Silicon nanopore array structure using porous anodic alumina
文献类型：期刊论文
| 作者 | Bai An-Qi; Hu Di; Ding Wu-Chang; Su Shao-Jian; Hu Wei-Xuan; Xue Chun-Lai; Fan Zhong-Chao; Cheng Bu-Wen; Yu Yu-De; Wang Qi-Ming |
| 刊名 | Acta physica sinica
 |
| 出版日期 | 2009-07-01 |
| 卷号 | 58期号:7页码:4997-5001 |
| 关键词 | Porous anodic alumina mask Silicon nanopore array structure Pattern transfer |
| ISSN号 | 1000-3290 |
| 通讯作者 | Cheng bu-wen(cbw@red.semi.ac.cn) |
| 英文摘要 | A free-standing, bidirectionally permeable and ultra-thin (500-1000 nm) porous anodic alumina membrane was fabricated using a two-step aluminium anodization process, which was then placed on top of a silicon film as an etching mask. the pattern was transferred to silicon using dry-etching technology, and the silicon nanopore array structure was formed. the factors which afflct the pattern transfer process are discussed. observation of the nanopatterned sample under a scanning electron microscope shows that the structure obtained by this method is made up of uniform and highly ordered holes, which attains to 125 nm depth. the photoluminescence spectrum from the nanopatterned sample,the surface of which has been thermal-oxidized, shows that the the luminesce is evidently enhanced, the mechanism of which is based on the normally weak to phonon assisted bandgap light-emission process, and the physical reasons that underlic the enhancement have been analyzed. the pl results do show an attractive optical characteristic, which provides a promising pathway to achieve efficient light emission from silicon. |
| WOS关键词 | OPTICAL GAIN ; NANOCRYSTALS ; FABRICATION |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000268263700098 |
| 出版者 | CHINESE PHYSICAL SOC |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427507 |
| 专题 | 半导体研究所 |
| 通讯作者 | Cheng Bu-Wen |
| 作者单位 | Chinese Acad Sci, State Key Lab Integrated Optoelect, Inst Semicond, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Bai An-Qi,Hu Di,Ding Wu-Chang,et al. Silicon nanopore array structure using porous anodic alumina[J]. Acta physica sinica,2009,58(7):4997-5001. |
| APA | Bai An-Qi.,Hu Di.,Ding Wu-Chang.,Su Shao-Jian.,Hu Wei-Xuan.,...&Wang Qi-Ming.(2009).Silicon nanopore array structure using porous anodic alumina.Acta physica sinica,58(7),4997-5001. |
| MLA | Bai An-Qi,et al."Silicon nanopore array structure using porous anodic alumina".Acta physica sinica 58.7(2009):4997-5001. |
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来源：半导体研究所
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