Growth of nonpolar a-plane gan on nano-patterned r-plane sapphire substrates
文献类型：期刊论文
| 作者 | Gao, Haiyong; Yan, Fawang; Zhang, Yang; Li, Jinmin; Zeng, Yiping; Wang, Junxi |
| 刊名 | Applied surface science
 |
| 出版日期 | 2009 |
| 卷号 | 255期号:6页码:3664-3668 |
| 关键词 | Gan Nonpolar Mocvd Nano-patterned |
| ISSN号 | 0169-4332 |
| DOI | 10.1016/j.apsusc.2008.10.018 |
| 通讯作者 | Gao, haiyong(hygao2005@yahoo.com) |
| 英文摘要 | Sapphire substrates were nano-patterned by inductive coupled plasma etching process. nonpolar a-plane gan films were grown on planar and nano-patterned r-plane sapphire substrates by metal organic chemical vapor deposition. the anisotropic characteristic and the crystalline quality of the a-plane gan films were studied through xrd rocking curves. the cross section and surface morphologies of the a-plane gan films were studied using sem and afm measurements, respectively. the crystal quality and surface flatness of the nonpolar a-plane gan were greatly improved through the usage of the nano-patterned r-plane sapphire substrates. (c) 2008 elsevier b.v. all rights reserved. |
| WOS关键词 | EPITAXIAL LATERAL OVERGROWTH ; LIGHT-EMITTING-DIODES ; OPTICAL-PROPERTIES ; QUANTUM-WELLS ; POLARIZATION ; FILMS ; TIME |
| WOS研究方向 | Chemistry ; Materials Science ; Physics |
| WOS类目 | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| 语种 | 英语 |
| WOS记录号 | WOS:000261972100034 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427508 |
| 专题 | 半导体研究所 |
| 通讯作者 | Gao, Haiyong |
| 作者单位 | Chinese Acad Sci, Inst Semicond, Semicond Lighting Res & Dev Ctr, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Gao, Haiyong,Yan, Fawang,Zhang, Yang,et al. Growth of nonpolar a-plane gan on nano-patterned r-plane sapphire substrates[J]. Applied surface science,2009,255(6):3664-3668. |
| APA | Gao, Haiyong,Yan, Fawang,Zhang, Yang,Li, Jinmin,Zeng, Yiping,&Wang, Junxi.(2009).Growth of nonpolar a-plane gan on nano-patterned r-plane sapphire substrates.Applied surface science,255(6),3664-3668. |
| MLA | Gao, Haiyong,et al."Growth of nonpolar a-plane gan on nano-patterned r-plane sapphire substrates".Applied surface science 255.6(2009):3664-3668. |
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来源：半导体研究所
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