Design and fabrication of a photonic crystal channel drop filter based on an asymmetric silicon-on-insulator slab
文献类型：期刊论文
| 作者 | Yu, Hejun1,2; Yu, Jinzhong2; Yu, Yude2; Chen, Shaowu2 |
| 刊名 | Journal of nanoscience and nanotechnology
 |
| 出版日期 | 2009-02-01 |
| 卷号 | 9期号:2页码:974-977 |
| ISSN号 | 1533-4880 |
| 关键词 | Photonic crystal (pc) Channel-drop filter Silicon-on-insulator (soi) |
| DOI | 10.1166/jnn.2009.c066 |
| 通讯作者 | Yu, hejun() |
| 英文摘要 | We report on the design and fabrication of a photonic crystal (pc) channel drop filter based on an asymmetric silicon-on-insulator (soi) slab. the filter is composed of two symmetric stick-shape micro-cavities between two single-line-defect (w1) waveguides in a triangular lattice, and the phase matching condition for the filter to improve the drop efficiency is satisfied by modifying the positions and radii of the air holes around the micro-cavities. a sample is then fabricated by using electron beam lithography (ebl) and inductively coupled plasma (icp) etching processes. the measured 0 factor of the filter is about 1140, and the drop efficiency is estimated to be 73% +/- 5% by fitting the transmission spectrum. |
| WOS关键词 | MODES |
| WOS研究方向 | Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics |
| WOS类目 | Chemistry, Multidisciplinary ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter |
| 语种 | 英语 |
| 出版者 | AMER SCIENTIFIC PUBLISHERS |
| WOS记录号 | WOS:000263653300066 |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427538 |
| 专题 | 半导体研究所 |
| 通讯作者 | Yu, Hejun |
| 作者单位 | 1.Beijing Univ Posts & Telecommun, Minist Educ, Key Lab Opt Commun & Lightwave Technol, Beijing 100876, Peoples R China 2.Chinese Acad Sci, State Key Lab Integrated Optoelect, Inst Semicond, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yu, Hejun,Yu, Jinzhong,Yu, Yude,et al. Design and fabrication of a photonic crystal channel drop filter based on an asymmetric silicon-on-insulator slab[J]. Journal of nanoscience and nanotechnology,2009,9(2):974-977. |
| APA | Yu, Hejun,Yu, Jinzhong,Yu, Yude,&Chen, Shaowu.(2009).Design and fabrication of a photonic crystal channel drop filter based on an asymmetric silicon-on-insulator slab.Journal of nanoscience and nanotechnology,9(2),974-977. |
| MLA | Yu, Hejun,et al."Design and fabrication of a photonic crystal channel drop filter based on an asymmetric silicon-on-insulator slab".Journal of nanoscience and nanotechnology 9.2(2009):974-977. |
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来源：半导体研究所
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