Epitaxial growth of alingan quaternary alloys by rf-mbe
文献类型：期刊论文
| 作者 | Wang Bao-Zhu1,2; Wang Xiao-Liang2 |
| 刊名 | Journal of inorganic materials
 |
| 出版日期 | 2009-05-01 |
| 卷号 | 24期号:3页码:559-562 |
| 关键词 | Alingan Rf-mbe Structural properties Optical properties |
| ISSN号 | 1000-324X |
| DOI | 10.3724/sp.j.1077.2009.00559 |
| 通讯作者 | Wang bao-zhu(wangbz@semi.ac.cn) |
| 英文摘要 | Alingan quaternary alloys were successfully grown on sapphire substrate by radio-frequency plasma-excited molecular beam epitaxy (rf-mbe). alingan quaternary alloys with different compositions were acquired by changing the al cell's temperature. the streaky rheed patterns were observed during alingan quaternary alloys growth. scanning electron microscope (sem), rutherford back-scattering spectrometry (rbs), x-ray diffraction (xrd) and cathodoluminescence (cl) were used to characterize the structural and optical properties of the alingan alloys. the experimental results show that the alingan quaternary alloys grow on the gan buffer in the layer-by-layer growth mode. when the al cell's temperature is 920 degrees c, the al/in ratio in the alingan quaternary alloys is about 4.7, and the alingan can acquire better crystal and optical quality. the x-ray and cl full-width at half-maximum (fwhm) of the alingan are 5arcmin and 25nm, respectively. |
| WOS关键词 | MOLECULAR-BEAM EPITAXY |
| WOS研究方向 | Materials Science |
| WOS类目 | Materials Science, Ceramics |
| 语种 | 英语 |
| WOS记录号 | WOS:000266303700028 |
| 出版者 | SCIENCE PRESS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427583 |
| 专题 | 半导体研究所 |
| 通讯作者 | Wang Bao-Zhu |
| 作者单位 | 1.Hebei Univ Sci & Technol, Inst Informat Sci & Technol, Shijiazhuang 050018, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang Bao-Zhu,Wang Xiao-Liang. Epitaxial growth of alingan quaternary alloys by rf-mbe[J]. Journal of inorganic materials,2009,24(3):559-562. |
| APA | Wang Bao-Zhu,&Wang Xiao-Liang.(2009).Epitaxial growth of alingan quaternary alloys by rf-mbe.Journal of inorganic materials,24(3),559-562. |
| MLA | Wang Bao-Zhu,et al."Epitaxial growth of alingan quaternary alloys by rf-mbe".Journal of inorganic materials 24.3(2009):559-562. |
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来源：半导体研究所
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