Gap states and microstructure of microcrystalline silicon thin films
文献类型：期刊论文
| 作者 | Peng Wen-Bo1; Liu Shi-Yong1; Xiao Hai-Bo1; Zhang Chang-Sha1; Shi Ming-Ji1; Zeng Xiang-Bo1; Xu Yan-Yue2; Kong Guang-Lin1; Yu Yu-De1 |
| 刊名 | Acta physica sinica
 |
| 出版日期 | 2009-08-01 |
| 卷号 | 58期号:8页码:5716-5720 |
| 关键词 | Gap states Grain boundary Microcrystalline silicon Modulated photocurrent |
| ISSN号 | 1000-3290 |
| 通讯作者 | Zeng xiang-bo(xbzeng@semi.ac.cn) |
| 英文摘要 | The density of states (dos) above fermi level of hydrogenated microcrystalline silicon (mu c-si:h) films is correlated to the material microstructure. we use raman scattering and infrared absorption spectra to characterize the structure of the films made with different hydrogen dilution ratios. the dos of the films is examined by modulated photocurrent measurement. the results have been accounted for in the framework of a three-phase model comprised of amorphous and crystalline components, with the grain boundary as the third phase. we observed that the dos increases monotonically as the grain boundary volume fractions f(gb) is increased, which indicates a positive correlation between the dos and the grain boundary volume fraction. |
| WOS关键词 | A-SI-H ; SOLAR-CELLS ; HYDROGEN DILUTION ; LIGHT-SCATTERING ; TRANSITION FILMS ; RAMAN ; TEMPERATURE ; DEPOSITION ; CRYSTALLINE ; STABILITY |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000269228600090 |
| 出版者 | CHINESE PHYSICAL SOC |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427585 |
| 专题 | 半导体研究所 |
| 通讯作者 | Zeng Xiang-Bo |
| 作者单位 | 1.Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China 2.China Agr Univ, Dept Appl Phys, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Peng Wen-Bo,Liu Shi-Yong,Xiao Hai-Bo,et al. Gap states and microstructure of microcrystalline silicon thin films[J]. Acta physica sinica,2009,58(8):5716-5720. |
| APA | Peng Wen-Bo.,Liu Shi-Yong.,Xiao Hai-Bo.,Zhang Chang-Sha.,Shi Ming-Ji.,...&Yu Yu-De.(2009).Gap states and microstructure of microcrystalline silicon thin films.Acta physica sinica,58(8),5716-5720. |
| MLA | Peng Wen-Bo,et al."Gap states and microstructure of microcrystalline silicon thin films".Acta physica sinica 58.8(2009):5716-5720. |
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来源：半导体研究所
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