Multi-channel micro neural probe fabricated with soi
文献类型：期刊论文
| 作者 | Pei WeiHua1,2; Zhu Lin2; Wang ShuJing2; Guo Kai2; Tang Jun2; Zhang Xu2; Lu Lin2; Gao ShangKai1; Chen HongDa2 |
| 刊名 | Science in china series e-technological sciences
 |
| 出版日期 | 2009-05-01 |
| 卷号 | 52期号:5页码:1187-1190 |
| 关键词 | Micro neural probe Soi Impedance Recording |
| ISSN号 | 1006-9321 |
| DOI | 10.1007/s11431-008-0272-9 |
| 通讯作者 | Pei weihua(peiwh@semi.ac.cn) |
| 英文摘要 | Silicon-on-insulator (soi) substrate is widely used in micro-electro-mechanical systems (mems). with the buried oxide layer of soi acting as an etching stop, silicon based micro neural probe can be fabricated with improved uniformity and manufacturability. a seven-record-site neural probe was formed by inductive-coupled plasma (icp) dry etching of an soi substrate. the thickness of the probe is 15 mu m. the shaft of the probe has dimensions of 3 mmx100 mu mx15 mu m with typical area of the record site of 78.5 mu m(2). the impedance of the record site was measured in-vitro. the typical impedance characteristics of the record sites are around 2 m omega at 1 khz. the performance of the neural probe in-vivo was tested on anesthetic rat. the recorded neural spike was typically around 140 mu v. spike from individual site could exceed 700 mu v. the average signal noise ratio was 7 or more. |
| WOS关键词 | INTERFACES |
| WOS研究方向 | Engineering ; Materials Science |
| WOS类目 | Engineering, Multidisciplinary ; Materials Science, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000265960500008 |
| 出版者 | SCIENCE PRESS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427693 |
| 专题 | 半导体研究所 |
| 通讯作者 | Pei WeiHua |
| 作者单位 | 1.Tsinghua Univ, Dept Biomed Engn, Beijing 100084, Peoples R China 2.Acad Sinica, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Pei WeiHua,Zhu Lin,Wang ShuJing,et al. Multi-channel micro neural probe fabricated with soi[J]. Science in china series e-technological sciences,2009,52(5):1187-1190. |
| APA | Pei WeiHua.,Zhu Lin.,Wang ShuJing.,Guo Kai.,Tang Jun.,...&Chen HongDa.(2009).Multi-channel micro neural probe fabricated with soi.Science in china series e-technological sciences,52(5),1187-1190. |
| MLA | Pei WeiHua,et al."Multi-channel micro neural probe fabricated with soi".Science in china series e-technological sciences 52.5(2009):1187-1190. |
入库方式： iSwitch采集
来源：半导体研究所
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