Experimental investigation on submicron rib waveguide microring/racetrack resonators in silicon-on-insulator
文献类型：期刊论文
| 作者 | Huang, Qingzhong; Yu, Yude; Yu, Jinzhong |
| 刊名 | Optics communications
 |
| 出版日期 | 2009 |
| 卷号 | 282期号:1页码:22-26 |
| 关键词 | Resonators Submicron rib waveguides Silicon-on-insulator Polarization |
| ISSN号 | 0030-4018 |
| DOI | 10.1016/j.optcom.2008.09.052 |
| 通讯作者 | Yu, jinzhong(jzyu@red.semi.ac.cn) |
| 英文摘要 | In experiment, characteristics of silicon microring/racetrack resonators in submicron rib waveguides have been systematically investigated. it is demonstrated that only a transverse-electric mode is guided for a ratio of slab height to rib height h/h = 0.5. thus, these microring/racetrack resonators can only function for quasi-transverse-electric mode, while they get rid of transverse-magnetic polarization. electron beam lithography and inductively coupled plasma etching were employed and improved to reduce side-wall roughness for low propagation loss and high performance resonators. then, the effects of waveguide dimensions, coupling region design, waveguide roughness, and oxide cladding for the resonators have been considered and analyzed. (c) 2008 elsevier b.v. all rights reserved. |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000261548000005 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427744 |
| 专题 | 半导体研究所 |
| 通讯作者 | Yu, Jinzhong |
| 作者单位 | Chinese Acad Sci, Inst Semicond, Natl Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Huang, Qingzhong,Yu, Yude,Yu, Jinzhong. Experimental investigation on submicron rib waveguide microring/racetrack resonators in silicon-on-insulator[J]. Optics communications,2009,282(1):22-26. |
| APA | Huang, Qingzhong,Yu, Yude,&Yu, Jinzhong.(2009).Experimental investigation on submicron rib waveguide microring/racetrack resonators in silicon-on-insulator.Optics communications,282(1),22-26. |
| MLA | Huang, Qingzhong,et al."Experimental investigation on submicron rib waveguide microring/racetrack resonators in silicon-on-insulator".Optics communications 282.1(2009):22-26. |
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来源：半导体研究所
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