Fiber bragg grating pressure sensor with ultrahigh sensitivity and reduced temperature sensitivity
文献类型：期刊论文
| 作者 | Zhang, Wentao; Li, Fang; Liu, Yuliang |
| 刊名 | Optical engineering
 |
| 出版日期 | 2009-02-01 |
| 卷号 | 48期号:2页码:4 |
| 关键词 | Pressure sensor Fiber bragg grating Diaphragm |
| ISSN号 | 0091-3286 |
| DOI | 10.1117/1.3081058 |
| 通讯作者 | Zhang, wentao(zhangwt@semi.ac.cn) |
| 英文摘要 | A fiber bragg grating (fbg) pressure sensing scheme based on a flat diaphragm and an l-shaped lever is presented. an l-shaped lever transfers the pressure-induced defection of the flat diaphragm to the axial elongation of the fbg. the curve where the l-shaped lever contacts the diaphragm is a segment of an archimedes spiral, which is used to enhance the responsivity. because the thermal expansion coefficient of the quartz-glass l-shaped lever and the steel sensor shell is different, the temperature effect is compensated for by optimizing the dimension parameters. theoretical analysis is presented, and the experimental results show that an ultrahigh pressure responsivity of 244 pm/kpa and a low temperature responsivity of 2.8 pm/degrees c are achieved. (c) 2009 society of photo-optical instrumentation engineers. [doi: 10.1117/1.3081058] |
| WOS关键词 | FBG |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000264114500011 |
| 出版者 | SPIE-SOC PHOTOPTICAL INSTRUMENTATION ENGINEERS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427767 |
| 专题 | 半导体研究所 |
| 通讯作者 | Zhang, Wentao |
| 作者单位 | Chinese Acad Sci, Inst Semicond, Optoelect Syst Lab, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Wentao,Li, Fang,Liu, Yuliang. Fiber bragg grating pressure sensor with ultrahigh sensitivity and reduced temperature sensitivity[J]. Optical engineering,2009,48(2):4. |
| APA | Zhang, Wentao,Li, Fang,&Liu, Yuliang.(2009).Fiber bragg grating pressure sensor with ultrahigh sensitivity and reduced temperature sensitivity.Optical engineering,48(2),4. |
| MLA | Zhang, Wentao,et al."Fiber bragg grating pressure sensor with ultrahigh sensitivity and reduced temperature sensitivity".Optical engineering 48.2(2009):4. |
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来源：半导体研究所
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