The structure, morphology and raman scattering study on mn-implanted nonpolar a-plane gan films
文献类型：期刊论文
| 作者 | Sun, Lili; Yan, Fawang; Zhang, Huixiao; Wang, Junxi; Zeng, Yiping; Wang, Guohong; Li, Jinmin |
| 刊名 | Materials science and engineering b-advanced functional solid-state materials
 |
| 出版日期 | 2009-06-15 |
| 卷号 | 162期号:3页码:209-212 |
| 关键词 | Ion implantation Metal organic chemical vapour deposition (mocvd) Diluted magnetic semiconductor (dms) Nonpolar a-plane gan |
| ISSN号 | 0921-5107 |
| DOI | 10.1016/j.mseb.2009.04.009 |
| 通讯作者 | Sun, lili(lilisun@semi.ac.cn) |
| 英文摘要 | Dilute magnetic nonpolar gan films with a curie temperature above room temperature have been fabricated by implanting mn ions into unintentionally doped nonpolar a-plane (1 1 (2) over bar 0) gan films and a subsequent rapid thermal annealing (rta) process. the impact of the implantation and rta on the structure and morphology of the nonpolar gan films is studied in this paper. the scanning electron microscopy analysis shows that the rta process can effectively recover the implantation-induced damage to the surface morphology of the sample. the x-ray diffraction and micro-raman scattering spectroscopy analyses show that the rta process can just partially recover the implantation-induced crystal deterioration. therefore, the quality of the mn-implanted nonpolar gan films should be improved further for the application in spintronic devices. (c) 2009 elsevier b.v. all rights reserved. |
| WOS关键词 | ROOM-TEMPERATURE |
| WOS研究方向 | Materials Science ; Physics |
| WOS类目 | Materials Science, Multidisciplinary ; Physics, Condensed Matter |
| 语种 | 英语 |
| WOS记录号 | WOS:000268159800013 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427775 |
| 专题 | 半导体研究所 |
| 通讯作者 | Sun, Lili |
| 作者单位 | Chinese Acad Sci, Inst Semicond, Semicond Lighting Technol Res & Dev Ctr, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Sun, Lili,Yan, Fawang,Zhang, Huixiao,et al. The structure, morphology and raman scattering study on mn-implanted nonpolar a-plane gan films[J]. Materials science and engineering b-advanced functional solid-state materials,2009,162(3):209-212. |
| APA | Sun, Lili.,Yan, Fawang.,Zhang, Huixiao.,Wang, Junxi.,Zeng, Yiping.,...&Li, Jinmin.(2009).The structure, morphology and raman scattering study on mn-implanted nonpolar a-plane gan films.Materials science and engineering b-advanced functional solid-state materials,162(3),209-212. |
| MLA | Sun, Lili,et al."The structure, morphology and raman scattering study on mn-implanted nonpolar a-plane gan films".Materials science and engineering b-advanced functional solid-state materials 162.3(2009):209-212. |
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来源：半导体研究所
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