中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Phase transition of vanadium oxide films annealed with different methods

文献类型:期刊论文

作者Liang Ji-Ran1,2; Hu Ming1; Wang Xiao-Dong2; Kan Qiang2; Li Gui-Ke2; Chen Hong-Da2
刊名Journal of infrared and millimeter waves
出版日期2010-12-01
卷号29期号:6页码:457-460
关键词Vanadium dioxide thin film Infrared transmission spectrum Rapid elevating temperatue
ISSN号1001-9014
通讯作者Liang ji-ran(liang_jiran@tju.edu.cn)
英文摘要Vanadium oxide thin films were deposited by dual ion beam sputtering, and then annealled with different procedures of temperature elevating. optical transmission properties were measured at different temperature by use of fourier transform infrared spectrum, from which the relationship of transmission and temperature at a fixed wavelength of 5 mu m was obtained. the results show that the vanadium oxide thin film annealed with rapid elevating temperature has smaller and uniform crystal size, while the film annealed with normal elevating temperature has larger and wider distributed crystal size. all the films after annealing have abrupt change over 60% in transmission in infrared band. the phase transition temperature of vanadium oxide thin film after rapid elevating temperature annealing is 63.74 degrees c, which is higher than that of vanadium oxide thin film after normal elevating temperature annealing, 60.31 degrees c. the temperature range of phase transition of the former is also broader.
WOS关键词THIN-FILMS ; VO2 FILMS ; TEMPERATURE ; FABRICATION
WOS研究方向Optics
WOS类目Optics
语种英语
WOS记录号WOS:000285662200014
出版者SCIENCE CHINA PRESS
URI标识http://www.irgrid.ac.cn/handle/1471x/2427824
专题半导体研究所
通讯作者Liang Ji-Ran
作者单位1.Tianjin Univ, Sch Elect & Informat Engn, Tianjin 300072, Peoples R China
2.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Liang Ji-Ran,Hu Ming,Wang Xiao-Dong,et al. Phase transition of vanadium oxide films annealed with different methods[J]. Journal of infrared and millimeter waves,2010,29(6):457-460.
APA Liang Ji-Ran,Hu Ming,Wang Xiao-Dong,Kan Qiang,Li Gui-Ke,&Chen Hong-Da.(2010).Phase transition of vanadium oxide films annealed with different methods.Journal of infrared and millimeter waves,29(6),457-460.
MLA Liang Ji-Ran,et al."Phase transition of vanadium oxide films annealed with different methods".Journal of infrared and millimeter waves 29.6(2010):457-460.

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来源:半导体研究所

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