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Effects of hydrogen plasma treatment on the electrical and optical properties of zno films: identification of hydrogen donors in zno

文献类型:期刊论文

作者Dong, J. J.1; Zhang, X. W.1; You, J. B.1,2; Cai, P. F.1; Yin, Z. G.1; An, Q.1; Ma, X. B.2; Jin, P.1; Wang, Z. G.1; Chu, Paul K.2
刊名Acs applied materials & interfaces
出版日期2010-06-01
卷号2期号:6页码:1780-1784
关键词Hydrogen plasma treatment Zinc oxide Raman spectroscopy Photoluminescence
ISSN号1944-8244
DOI10.1021/am100298p
通讯作者Zhang, x. w.(xwzhang@semi.ac.cn)
英文摘要Wurtzite zno has many potential applications in optoelectronic devices, and the hydrogenated zno exhibits excellent photoelectronic properties compared to undoped zno; however, the structure of h-related defects is still unclear. in this article, the effects of hydrogen-plasma treatment and subsequent annealing on the electrical and optical properties of zno films were investigated by a combination of hall measurement, raman scattering, and photoluminescence. it is found that two types of hydrogen-related defects, namely, the interstitial hydrogen located at the bond-centered (h(bc)) and the hydrogen trapped at a o vacancy (h(o)), are responsible for the n-type background conductivity of zno films. besides introducing two hydrogen-related donor states, the incorporated hydrogen passivates defects at grain boundaries. with increasing annealing temperatures, the unstable h(bc) atoms gradually diffuse out of the zno films and part of them are converted into h(o), which gives rise to two anomalous raman peaks at 275 and 510 cm(-1). these results help to clarify the relationship between the hydrogen-related defects in zno described in various studies and the free carriers that are produced by the introduction of hydrogen.
WOS关键词RAMAN-SCATTERING ; IMPLANTED ZNO ; THIN-FILMS ; DENSITY
WOS研究方向Science & Technology - Other Topics ; Materials Science
WOS类目Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary
语种英语
WOS记录号WOS:000278963600035
出版者AMER CHEMICAL SOC
URI标识http://www.irgrid.ac.cn/handle/1471x/2427846
专题半导体研究所
通讯作者Zhang, X. W.
作者单位1.Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
2.City Univ Hong Kong, Dept Phys & Mat Sci, Kowloon, Hong Kong, Peoples R China
推荐引用方式
GB/T 7714
Dong, J. J.,Zhang, X. W.,You, J. B.,et al. Effects of hydrogen plasma treatment on the electrical and optical properties of zno films: identification of hydrogen donors in zno[J]. Acs applied materials & interfaces,2010,2(6):1780-1784.
APA Dong, J. J..,Zhang, X. W..,You, J. B..,Cai, P. F..,Yin, Z. G..,...&Chu, Paul K..(2010).Effects of hydrogen plasma treatment on the electrical and optical properties of zno films: identification of hydrogen donors in zno.Acs applied materials & interfaces,2(6),1780-1784.
MLA Dong, J. J.,et al."Effects of hydrogen plasma treatment on the electrical and optical properties of zno films: identification of hydrogen donors in zno".Acs applied materials & interfaces 2.6(2010):1780-1784.

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来源:半导体研究所

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