Fabrication of silicon-based template-assisted nanoelectrode arrays and ohmic contact properties investigation
文献类型：期刊论文
| 作者 | Bai, Anqi1; Cheng, Buwen1; Wang, Xiaofeng2; Xue, Chunlai1; Zuo, Yuhua1; Wang, Qiming1 |
| 刊名 | Journal of nanoscience and nanotechnology
 |
| 出版日期 | 2010-11-01 |
| 卷号 | 10期号:11页码:7428-7431 |
| 关键词 | Nanoelectrode arrays Paa Electroless deposition Sem I-v |
| ISSN号 | 1533-4880 |
| DOI | 10.1166/jnn.2010.2845 |
| 通讯作者 | Cheng, buwen() |
| 英文摘要 | A convenient fabrication technology for large-area, highly-ordered nanoelectrode arrays on silicon substrate has been described here, using porous anodic alumina (paa) as a template. the ultrathin paa membranes were anodic oxidized utilizing a two-step anodization method, from al film evaporated on substrate. the purposes for the use of two-step anodization were, first, improving the regularity of the porous structures, and second reducing the thickness of the membranes to 100 similar to 200 nm we desired. then the nanoelectrode arrays were obtained by electroless depositing ni-w alloy into the through pores of paa membranes, making the alloy isolated by the insulating pore walls and contacting with the silicon substrates at the bottoms of pores. the ni-w alloy was also electroless deposited at the back surface of silicon to form back electrode. then ohmic contact properties between silicon and ni-w alloy were investigated after rapid thermal annealing. scanning electron microscopy (sem) observations showed the structure characteristics, and the influence factors of fabrication effect were discussed. the current voltage (i-v) curves revealed the contact properties. after annealing in n(2) at 700 degrees c, good linear property was shown with contact resistance of 33 omega, which confirmed ohmic contacts between silicon and electrodes. these results presented significant application potential of this technology in nanosize current-injection devices in optoelectronics, microelectronics and bio-medical fields. |
| WOS关键词 | ANODIC ALUMINA FILMS ; NANOWIRE ARRAYS ; POROUS ALUMINA ; NANOCRYSTALS |
| WOS研究方向 | Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics |
| WOS类目 | Chemistry, Multidisciplinary ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter |
| 语种 | 英语 |
| WOS记录号 | WOS:000283621300100 |
| 出版者 | AMER SCIENTIFIC PUBLISHERS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427895 |
| 专题 | 半导体研究所 |
| 通讯作者 | Cheng, Buwen |
| 作者单位 | 1.Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Engn Res Ctr Semicond Integrated Technol, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Bai, Anqi,Cheng, Buwen,Wang, Xiaofeng,et al. Fabrication of silicon-based template-assisted nanoelectrode arrays and ohmic contact properties investigation[J]. Journal of nanoscience and nanotechnology,2010,10(11):7428-7431. |
| APA | Bai, Anqi,Cheng, Buwen,Wang, Xiaofeng,Xue, Chunlai,Zuo, Yuhua,&Wang, Qiming.(2010).Fabrication of silicon-based template-assisted nanoelectrode arrays and ohmic contact properties investigation.Journal of nanoscience and nanotechnology,10(11),7428-7431. |
| MLA | Bai, Anqi,et al."Fabrication of silicon-based template-assisted nanoelectrode arrays and ohmic contact properties investigation".Journal of nanoscience and nanotechnology 10.11(2010):7428-7431. |
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来源：半导体研究所
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