Effects of annealing treatment on the formation of co2 in zno thin films grown by metal-organic chemical vapor deposition
文献类型：期刊论文
| 作者 | Zheng, Gaolin; Yang, Anli; Wei, Hongyuan; Liu, Xianglin; Song, Huaping; Guo, Yan; Jia, Caihong; Jiao, Chunmei; Yang, Shaoyan; Zhu, Qinsheng |
| 刊名 | Applied surface science
 |
| 出版日期 | 2010-02-01 |
| 卷号 | 256期号:8页码:2606-2610 |
| 关键词 | Zno Metal-organic chemical vapor deposition Infrared absorption Surface |
| ISSN号 | 0169-4332 |
| DOI | 10.1016/j.apsusc.2009.10.109 |
| 通讯作者 | Zheng, gaolin(zhenggl@semi.ac.cn) |
| 英文摘要 | Post-growth annealing was carried out on zno thin films grown by metal-organic chemical vapor deposition (mocvd). the grain size of zno thin film increases monotonically with annealing temperature. the zno thin films were preferential to c-axis oriented after annealing as confirmed by xray diffraction (xrd) measurements. fourier transformation infrared transmission measurements showed that zno films grown at low temperature contains co2 molecules after post-growth annealing. a two-step reaction process has been proposed to explain the formation mechanism of co2, which indicates the possible chemical reaction processes during the metal-organic chemical vapor deposition of zno films. (c) 2009 elsevier b.v. all rights reserved. |
| WOS关键词 | RAY PHOTOELECTRON-SPECTROSCOPY ; POLAR-SURFACE ; EPITAXY |
| WOS研究方向 | Chemistry ; Materials Science ; Physics |
| WOS类目 | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| 语种 | 英语 |
| WOS记录号 | WOS:000273670700052 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427904 |
| 专题 | 半导体研究所 |
| 通讯作者 | Zheng, Gaolin |
| 作者单位 | Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zheng, Gaolin,Yang, Anli,Wei, Hongyuan,et al. Effects of annealing treatment on the formation of co2 in zno thin films grown by metal-organic chemical vapor deposition[J]. Applied surface science,2010,256(8):2606-2610. |
| APA | Zheng, Gaolin.,Yang, Anli.,Wei, Hongyuan.,Liu, Xianglin.,Song, Huaping.,...&Wang, Zhanguo.(2010).Effects of annealing treatment on the formation of co2 in zno thin films grown by metal-organic chemical vapor deposition.Applied surface science,256(8),2606-2610. |
| MLA | Zheng, Gaolin,et al."Effects of annealing treatment on the formation of co2 in zno thin films grown by metal-organic chemical vapor deposition".Applied surface science 256.8(2010):2606-2610. |
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来源：半导体研究所
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