Preparation and optical performance of freestanding gan thick films
文献类型：期刊论文
| 作者 | Hu Qiang1,2; Wei Tongbo1; Duan Ruifei1; Yang Jiankun1; Huo Ziqiang1; Lu Tiecheng2; Zeng Yiping1 |
| 刊名 | Rare metal materials and engineering
 |
| 出版日期 | 2010-12-01 |
| 卷号 | 39期号:12页码:2169-2172 |
| 关键词 | Gan Hvpe Freestanding thick films Stress release Photoluminescence |
| ISSN号 | 1002-185X |
| 通讯作者 | Hu qiang(huqiang@semi.ac.cn) |
| 英文摘要 | High-quality freestanding gan thick films were deposited by hydride vapor phase epitaxy (hvpe) on sapphire wafer with a thin ti film on the top. the fwhm of (0002) peaks in the x-ray rocking curve profile is 260 arcsec. the fwhm of band edge emission peaks at 5 k and room temperature are 3 mev and 20 mev, respectively. the yellow spectral region is not observed at room temperature. the surface morphology of gan films was characterized by scanning electron microscope; results show that hexagonal pits from dislocation extension exist on the surface of freestanding gan thick films after corrosion and their dislocation density is estimated as 2.1 x 10(7) cm(-2). all these results prove that the ti metal interlayer improves the crystalline quality of gan epitaxial layer. the results of raman and pl show that the surface stress of the gan films is released completely. finally, the temperature-dependent pl was investigated; the result also proves that the stress-free freestanding gan thick films have high crystalline quality and optical quality. |
| WOS关键词 | VAPOR-PHASE EPITAXY ; GROWTH ; PRESSURE ; HVPE |
| WOS研究方向 | Materials Science ; Metallurgy & Metallurgical Engineering |
| WOS类目 | Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering |
| 语种 | 英语 |
| WOS记录号 | WOS:000286546800022 |
| 出版者 | NORTHWEST INST NONFERROUS METAL RESEARCH |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427976 |
| 专题 | 半导体研究所 |
| 通讯作者 | Hu Qiang |
| 作者单位 | 1.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China 2.Sichuan Univ, Key Lab Radiat Phys & Technol, Minist Educ, Chengdu 610064, Peoples R China |
| 推荐引用方式 GB/T 7714 | Hu Qiang,Wei Tongbo,Duan Ruifei,et al. Preparation and optical performance of freestanding gan thick films[J]. Rare metal materials and engineering,2010,39(12):2169-2172. |
| APA | Hu Qiang.,Wei Tongbo.,Duan Ruifei.,Yang Jiankun.,Huo Ziqiang.,...&Zeng Yiping.(2010).Preparation and optical performance of freestanding gan thick films.Rare metal materials and engineering,39(12),2169-2172. |
| MLA | Hu Qiang,et al."Preparation and optical performance of freestanding gan thick films".Rare metal materials and engineering 39.12(2010):2169-2172. |
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来源：半导体研究所
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