Evaluation of both composition and strain distributions in ingan epitaxial film using x-ray diffraction techniques
文献类型：期刊论文
| 作者 | Guo Xi; Wang Hui; Jiang De-Sheng; Wang Yu-Tian; Zhao De-Gang; Zhu Jian-Jun; Liu Zong-Shun; Zhang Shu-Ming; Yang Hui |
| 刊名 | Chinese physics b
 |
| 出版日期 | 2010-10-01 |
| 卷号 | 19期号:10页码:7 |
| 关键词 | Ingan In-plane grazing incidence x-ray diffraction Reciprocal space mapping Biaxial strain |
| ISSN号 | 1674-1056 |
| DOI | 10.1088/1674-1056/19/10/106802 |
| 通讯作者 | Guo xi(guox@semi.ac.cn) |
| 英文摘要 | The composition and stain distributions in the ingan epitaxial films are jointly measured by employing various x-ray diffraction (xrd) techniques, including out-of-plane xrd at special planes, in-plane grazing incidence xrd, and reciprocal space mapping (rsm). it is confirmed that the measurement of (204) reflection allows a rapid access to estimate the composition without considering the influence of biaxial strain. the two-dimensional rsm checks composition and degree of strain relaxation jointly, revealing an inhomogeneous strain distribution profile along the growth direction. as the film thickness increases from 100 nm to 450 nm, the strain status of ingan films gradually transfers from almost fully strained to fully relaxed state and then more in atoms incorporate into the film, while the near-interface region of ingan films remains pseudomorphic to gan. |
| WOS关键词 | CRITICAL LAYER THICKNESS ; OPTICAL-PROPERTIES ; LATTICE-CONSTANTS ; GAN ; HETEROSTRUCTURES ; ALLOYS ; WELLS |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000282923600062 |
| 出版者 | IOP PUBLISHING LTD |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427984 |
| 专题 | 半导体研究所 |
| 通讯作者 | Guo Xi |
| 作者单位 | Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Guo Xi,Wang Hui,Jiang De-Sheng,et al. Evaluation of both composition and strain distributions in ingan epitaxial film using x-ray diffraction techniques[J]. Chinese physics b,2010,19(10):7. |
| APA | Guo Xi.,Wang Hui.,Jiang De-Sheng.,Wang Yu-Tian.,Zhao De-Gang.,...&Yang Hui.(2010).Evaluation of both composition and strain distributions in ingan epitaxial film using x-ray diffraction techniques.Chinese physics b,19(10),7. |
| MLA | Guo Xi,et al."Evaluation of both composition and strain distributions in ingan epitaxial film using x-ray diffraction techniques".Chinese physics b 19.10(2010):7. |
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来源：半导体研究所
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