Study on tapered crossed subwavelength gratings by fourier modal method
文献类型：期刊论文
| 作者 | Chen Xi1; Zhong Yuan2; Wang Qing1; Zhang Ye-Jin1; Chen Liang-Hui1 |
| 刊名 | Chinese physics b
 |
| 出版日期 | 2010-10-01 |
| 卷号 | 19期号:10页码:7 |
| 关键词 | Tapered crossed subwavelength gratings Fourier modal method Staircase approximation Eigenvalue functions |
| ISSN号 | 1674-1056 |
| DOI | 10.1088/1674-1056/19/10/104101 |
| 通讯作者 | Chen xi(chenxi@semi.ac.cn) |
| 英文摘要 | Fourier modal method incorporating staircase approximation is used to study tapered crossed subwavelength gratings in this paper. three intuitive formulations of eigenvalue functions originating from the prototype are presented, and their convergences are compared through numerical calculation. one of them is found to be suitable in modeling the diffraction efficiency of the circular tapered crossed subwavelength gratings without high absorption, and staircase approximation is further proven valid for non-highly-absorption tapered gratings. this approach is used to simulate the "moth-eye" antireflection surface on silicon, and the numerical result agrees well with the experimental one. |
| WOS关键词 | SURFACE-RELIEF GRATINGS ; COUPLED-WAVE ANALYSIS ; FORMULATION ; DIFFRACTION ; IMPLEMENTATION ; CONVERGENCE |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000282923600040 |
| 出版者 | IOP PUBLISHING LTD |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2428016 |
| 专题 | 半导体研究所 |
| 通讯作者 | Chen Xi |
| 作者单位 | 1.Chinese Acad Sci, Inst Semicond, Nanooptoelect Lab, Beijing 100083, Peoples R China 2.Natl Inst Metrol, Beijing 100013, Peoples R China |
| 推荐引用方式 GB/T 7714 | Chen Xi,Zhong Yuan,Wang Qing,et al. Study on tapered crossed subwavelength gratings by fourier modal method[J]. Chinese physics b,2010,19(10):7. |
| APA | Chen Xi,Zhong Yuan,Wang Qing,Zhang Ye-Jin,&Chen Liang-Hui.(2010).Study on tapered crossed subwavelength gratings by fourier modal method.Chinese physics b,19(10),7. |
| MLA | Chen Xi,et al."Study on tapered crossed subwavelength gratings by fourier modal method".Chinese physics b 19.10(2010):7. |
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来源：半导体研究所
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