Fabrication of biomimic gaas subwavelength grating structures for broadband and angular-independent antireflection
文献类型：期刊论文
| 作者 | Chen, Xi1; Fan, Zhong-Chao2; Xu, Yun1; Song, Guo-Feng1; Chen, Liang-Hui1 |
| 刊名 | Microelectronic engineering
 |
| 出版日期 | 2011-09-01 |
| 卷号 | 88期号:9页码:2889-2893 |
| ISSN号 | 0167-9317 |
| 关键词 | Subwavelength gratings Broadband antireflection Interferometric lithography Moth eye |
| DOI | 10.1016/j.mee.2011.03.014 |
| 通讯作者 | Chen, xi(chenxi@semi.ac.cn) |
| 英文摘要 | We combine interferometric lithography and inductively coupled plasma etching to fabricate gaas subwavelength grating (swg) which mimics the moth eye structures. through the modification of morphology parameters, including profile, height and packing fraction, tapered, high-aspect-ratio and closely-packed gaas swgs are obtained. the measurement of spectral reflectance of the fabricated swgs shows that reflection has been dramatically reduced compared to the polished gaas surface. particularly, the optimized swg structures exhibit an average reflection below 5% in the wavelengths ranging from 350 to 900 nm. furthermore, the angular-independent property is demonstrated by measuring the reflectance versus varying angles of incidence at 532 and 632.8 nm wavelengths. (c) 2011 elsevier b.v. all rights reserved. |
| WOS关键词 | INTERFERENCE LITHOGRAPHY ; PHOTORESIST GRATINGS ; PROFILE ; LIGHT ; NANOSTRUCTURES ; REFLECTION ; REDUCTION ; ARRAY ; SI |
| WOS研究方向 | Engineering ; Science & Technology - Other Topics ; Optics ; Physics |
| WOS类目 | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied |
| 语种 | 英语 |
| 出版者 | ELSEVIER SCIENCE BV |
| WOS记录号 | WOS:000295557400012 |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2428125 |
| 专题 | 半导体研究所 |
| 通讯作者 | Chen, Xi |
| 作者单位 | 1.Chinese Acad Sci, Inst Semicond, Nanooptoelect Lab, Beijing 100083, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Engn Res Ctr Semicond Integrated Technol, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Chen, Xi,Fan, Zhong-Chao,Xu, Yun,et al. Fabrication of biomimic gaas subwavelength grating structures for broadband and angular-independent antireflection[J]. Microelectronic engineering,2011,88(9):2889-2893. |
| APA | Chen, Xi,Fan, Zhong-Chao,Xu, Yun,Song, Guo-Feng,&Chen, Liang-Hui.(2011).Fabrication of biomimic gaas subwavelength grating structures for broadband and angular-independent antireflection.Microelectronic engineering,88(9),2889-2893. |
| MLA | Chen, Xi,et al."Fabrication of biomimic gaas subwavelength grating structures for broadband and angular-independent antireflection".Microelectronic engineering 88.9(2011):2889-2893. |
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来源：半导体研究所
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