中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Cmos monolithic optoelectronic integrated circuit for on-chip optical interconnection

文献类型:期刊论文

作者Huang, Beiju1,2; Zhang, Xu1; Wang, Wei1; Dong, Zan1; Guan, Ning1; Zhang, Zanyun1; Chen, Hongda1
刊名Optics communications
出版日期2011-08-01
卷号284期号:16-17页码:3924-3927
关键词Led On-chip optical interconnects Optoelectronic integrated circuits (oeic) Cmos silicon photonics
ISSN号0030-4018
DOI10.1016/j.optcom.2011.04.028
通讯作者Huang, beiju(bjhuang@semi.ac.cn)
英文摘要A monolithic silicon cmos optoelectronic integrated circuit (oeic) is designed and fabricated using standard 0.35-mu m cmos technology. this oeic monolithically integrates light emitting diode (led), silicon dioxide waveguide, photodetector and receiver circuit on a single silicon chip. the silicon led operates in reverse breakdown mode and can emit light at 8.5 v. the output optical power is 31.2 nw under 9.8 v reverse bias. the measured spectrum of led showed two peaks at 760 nm and 810 nm, respectively. the waveguide is composed of silicon dioxide/metal multiple layers. the responsivity of the n-well/p-substrate diode photodetector is 0.42 a/w and the dark current is 7.8 pa. the led-emitted light transmits through the waveguide and can be detected by the photodetector. experimental results show that on-chip optical interconnects are achieved by standard cmos technology successfully. (c) 2011 elsevier b.v. all rights reserved.
WOS关键词DIODE
WOS研究方向Optics
WOS类目Optics
语种英语
WOS记录号WOS:000291920000018
出版者ELSEVIER SCIENCE BV
URI标识http://www.irgrid.ac.cn/handle/1471x/2428180
专题半导体研究所
通讯作者Huang, Beiju
作者单位1.Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
2.Tsinghua Univ, Dept Elect Engn, State Key Lab Integrated Optoelect, Beijing 100084, Peoples R China
推荐引用方式
GB/T 7714
Huang, Beiju,Zhang, Xu,Wang, Wei,et al. Cmos monolithic optoelectronic integrated circuit for on-chip optical interconnection[J]. Optics communications,2011,284(16-17):3924-3927.
APA Huang, Beiju.,Zhang, Xu.,Wang, Wei.,Dong, Zan.,Guan, Ning.,...&Chen, Hongda.(2011).Cmos monolithic optoelectronic integrated circuit for on-chip optical interconnection.Optics communications,284(16-17),3924-3927.
MLA Huang, Beiju,et al."Cmos monolithic optoelectronic integrated circuit for on-chip optical interconnection".Optics communications 284.16-17(2011):3924-3927.

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来源:半导体研究所

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