Cmos monolithic optoelectronic integrated circuit for on-chip optical interconnection
文献类型:期刊论文
| 作者 | Huang, Beiju1,2; Zhang, Xu1; Wang, Wei1; Dong, Zan1; Guan, Ning1; Zhang, Zanyun1; Chen, Hongda1 |
| 刊名 | Optics communications
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| 出版日期 | 2011-08-01 |
| 卷号 | 284期号:16-17页码:3924-3927 |
| 关键词 | Led On-chip optical interconnects Optoelectronic integrated circuits (oeic) Cmos silicon photonics |
| ISSN号 | 0030-4018 |
| DOI | 10.1016/j.optcom.2011.04.028 |
| 通讯作者 | Huang, beiju(bjhuang@semi.ac.cn) |
| 英文摘要 | A monolithic silicon cmos optoelectronic integrated circuit (oeic) is designed and fabricated using standard 0.35-mu m cmos technology. this oeic monolithically integrates light emitting diode (led), silicon dioxide waveguide, photodetector and receiver circuit on a single silicon chip. the silicon led operates in reverse breakdown mode and can emit light at 8.5 v. the output optical power is 31.2 nw under 9.8 v reverse bias. the measured spectrum of led showed two peaks at 760 nm and 810 nm, respectively. the waveguide is composed of silicon dioxide/metal multiple layers. the responsivity of the n-well/p-substrate diode photodetector is 0.42 a/w and the dark current is 7.8 pa. the led-emitted light transmits through the waveguide and can be detected by the photodetector. experimental results show that on-chip optical interconnects are achieved by standard cmos technology successfully. (c) 2011 elsevier b.v. all rights reserved. |
| WOS关键词 | DIODE |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000291920000018 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2428180 |
| 专题 | 半导体研究所 |
| 通讯作者 | Huang, Beiju |
| 作者单位 | 1.Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China 2.Tsinghua Univ, Dept Elect Engn, State Key Lab Integrated Optoelect, Beijing 100084, Peoples R China |
| 推荐引用方式 GB/T 7714 | Huang, Beiju,Zhang, Xu,Wang, Wei,et al. Cmos monolithic optoelectronic integrated circuit for on-chip optical interconnection[J]. Optics communications,2011,284(16-17):3924-3927. |
| APA | Huang, Beiju.,Zhang, Xu.,Wang, Wei.,Dong, Zan.,Guan, Ning.,...&Chen, Hongda.(2011).Cmos monolithic optoelectronic integrated circuit for on-chip optical interconnection.Optics communications,284(16-17),3924-3927. |
| MLA | Huang, Beiju,et al."Cmos monolithic optoelectronic integrated circuit for on-chip optical interconnection".Optics communications 284.16-17(2011):3924-3927. |
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来源:半导体研究所
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