Intrinsic zno films fabricated by dc sputtering from oxygen-deficient targets for cu(in,ga)se-2 solar cell application
文献类型:期刊论文
作者 | Yang, Chongyin1,2,3; Wan, Dongyun1; Wang, Zhou1; Huang, Fuqiang1 |
刊名 | Chinese optics letters
![]() |
出版日期 | 2011-10-10 |
卷号 | 9期号:10页码:4 |
ISSN号 | 1671-7694 |
DOI | 10.3788/col201109.103102 |
通讯作者 | Wan, dongyun(wandy@mail.sic.ac.cn) |
英文摘要 | Intrinsic zinc oxide films, normally deposited by radio frequency (rf) sputtering, are fabricated by direct current (dc) sputtering. the oxygen-deficient targets are prepared via a newly developed double crucible method. the 800-nm-thick film obtaines significantly higher carrier mobility compareing with that of the 800-nm-thick zno film. this is achieved by the widely used rf sputtering, which favors the prevention of carrier recombination at the interfaces and reduction of the series resistance of solar cells. the optimal zno film is used in a cu (ln, ga) se-2 (cigs) solar cell with a high efficiency of 11.57%. this letter demonstrates that the insulating zno films can be deposited by dc sputtering from oxygen-deficient zno targets to lower the cost of thin film solar cells. |
WOS关键词 | CHEMICAL-VAPOR-DEPOSITION ; BUFFER LAYER ; THIN-FILMS |
WOS研究方向 | Optics |
WOS类目 | Optics |
语种 | 英语 |
WOS记录号 | WOS:000295905000023 |
出版者 | CHINESE LASER PRESS |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2428305 |
专题 | 半导体研究所 |
通讯作者 | Wan, Dongyun |
作者单位 | 1.Chinese Acad Sci, Shanghai Inst Ceram, CAS Key Lab Mat Energy Convers, Shanghai 200050, Peoples R China 2.Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China 3.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China |
推荐引用方式 GB/T 7714 | Yang, Chongyin,Wan, Dongyun,Wang, Zhou,et al. Intrinsic zno films fabricated by dc sputtering from oxygen-deficient targets for cu(in,ga)se-2 solar cell application[J]. Chinese optics letters,2011,9(10):4. |
APA | Yang, Chongyin,Wan, Dongyun,Wang, Zhou,&Huang, Fuqiang.(2011).Intrinsic zno films fabricated by dc sputtering from oxygen-deficient targets for cu(in,ga)se-2 solar cell application.Chinese optics letters,9(10),4. |
MLA | Yang, Chongyin,et al."Intrinsic zno films fabricated by dc sputtering from oxygen-deficient targets for cu(in,ga)se-2 solar cell application".Chinese optics letters 9.10(2011):4. |
入库方式: iSwitch采集
来源:半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。