中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Intrinsic zno films fabricated by dc sputtering from oxygen-deficient targets for cu(in,ga)se-2 solar cell application

文献类型:期刊论文

作者Yang, Chongyin1,2,3; Wan, Dongyun1; Wang, Zhou1; Huang, Fuqiang1
刊名Chinese optics letters
出版日期2011-10-10
卷号9期号:10页码:4
ISSN号1671-7694
DOI10.3788/col201109.103102
通讯作者Wan, dongyun(wandy@mail.sic.ac.cn)
英文摘要Intrinsic zinc oxide films, normally deposited by radio frequency (rf) sputtering, are fabricated by direct current (dc) sputtering. the oxygen-deficient targets are prepared via a newly developed double crucible method. the 800-nm-thick film obtaines significantly higher carrier mobility compareing with that of the 800-nm-thick zno film. this is achieved by the widely used rf sputtering, which favors the prevention of carrier recombination at the interfaces and reduction of the series resistance of solar cells. the optimal zno film is used in a cu (ln, ga) se-2 (cigs) solar cell with a high efficiency of 11.57%. this letter demonstrates that the insulating zno films can be deposited by dc sputtering from oxygen-deficient zno targets to lower the cost of thin film solar cells.
WOS关键词CHEMICAL-VAPOR-DEPOSITION ; BUFFER LAYER ; THIN-FILMS
WOS研究方向Optics
WOS类目Optics
语种英语
WOS记录号WOS:000295905000023
出版者CHINESE LASER PRESS
URI标识http://www.irgrid.ac.cn/handle/1471x/2428305
专题半导体研究所
通讯作者Wan, Dongyun
作者单位1.Chinese Acad Sci, Shanghai Inst Ceram, CAS Key Lab Mat Energy Convers, Shanghai 200050, Peoples R China
2.Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China
3.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Yang, Chongyin,Wan, Dongyun,Wang, Zhou,et al. Intrinsic zno films fabricated by dc sputtering from oxygen-deficient targets for cu(in,ga)se-2 solar cell application[J]. Chinese optics letters,2011,9(10):4.
APA Yang, Chongyin,Wan, Dongyun,Wang, Zhou,&Huang, Fuqiang.(2011).Intrinsic zno films fabricated by dc sputtering from oxygen-deficient targets for cu(in,ga)se-2 solar cell application.Chinese optics letters,9(10),4.
MLA Yang, Chongyin,et al."Intrinsic zno films fabricated by dc sputtering from oxygen-deficient targets for cu(in,ga)se-2 solar cell application".Chinese optics letters 9.10(2011):4.

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来源:半导体研究所

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