Dry electrode for the measurement of biopotential signals
文献类型：期刊论文
| 作者 | Wang Yu1,2; Pei WeiHua1; Guo Kai1; Gui Qiang1; Li XiaoQian1; Chen HongDa1; Yang JianHong2 |
| 刊名 | Science china-information sciences
 |
| 出版日期 | 2011-11-01 |
| 卷号 | 54期号:11页码:2435-2442 |
| 关键词 | Dry electrode Microneedle array Dry etching Wet etching Eeg |
| ISSN号 | 1674-733X |
| DOI | 10.1007/s11432-011-4354-0 |
| 通讯作者 | Pei weihua(peiwh@semi.ac.cn) |
| 英文摘要 | This paper introduces a kind of silicon-based dry electrode for measuring biological signals. it uses microneedle arrays to penetrate into the stratum corneum to reduce skin impedance. the dry electrode requires neither skin preparation nor the electrolytic gel, is easy to use and causes no skin allergy. two different technologies are chosen to manufacture microneedle arrays of dry electrode. one is deep dry etching combined with isotropic wet etching. the other is mechanical dicing combined with chemical wet etching (including isotropic wet etching and anisotropic wet etching). microneedle arrays are coated with metal and divided into 25 mm(2) as dry electrode patch. impedance testing shows that the impedance value of dry electrode can be comparable with that of commercial electrode in the 20 hz-10 khz frequency range. the steady-state visual evoked potential recording and analysis prove that the dry electrode can be used to detect electroencephalography. |
| WOS关键词 | MICRONEEDLE ARRAY ; SILICON ; FABRICATION ; TECHNOLOGY ; INTERFACE ; POLYMER ; ECG |
| WOS研究方向 | Computer Science |
| WOS类目 | Computer Science, Information Systems |
| 语种 | 英语 |
| WOS记录号 | WOS:000297709100018 |
| 出版者 | SCIENCE PRESS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2428320 |
| 专题 | 半导体研究所 |
| 通讯作者 | Pei WeiHua |
| 作者单位 | 1.Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China 2.Lanzhou Univ, Sch Phys Sci & Technol, Inst Microelect, Lanzhou 730000, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang Yu,Pei WeiHua,Guo Kai,et al. Dry electrode for the measurement of biopotential signals[J]. Science china-information sciences,2011,54(11):2435-2442. |
| APA | Wang Yu.,Pei WeiHua.,Guo Kai.,Gui Qiang.,Li XiaoQian.,...&Yang JianHong.(2011).Dry electrode for the measurement of biopotential signals.Science china-information sciences,54(11),2435-2442. |
| MLA | Wang Yu,et al."Dry electrode for the measurement of biopotential signals".Science china-information sciences 54.11(2011):2435-2442. |
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来源：半导体研究所
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