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Structural ordering and interface morphology in symmetrically strained (gain)as/ga(pas) superlattices grown on off-oriented gaas(100)

文献类型:期刊论文

作者Giannini, C; Tapfer, L; Zhuang, Y; De Caro, L; Marschner, T; Stolz, W
刊名Physical review b
出版日期1997-02-15
卷号55期号:8页码:5276-5283
ISSN号1098-0121
通讯作者Giannini, c()
英文摘要In this work we investigate the structural properties of symmetrically strained (gain)as/gaas/ga(pas)/gaas superlattices by means of x-ray diffraction, reciprocal-space mapping, and x-ray reflectivity. the multilayers were grown by metalorganic vapor-phase epitaxy on (001) gaas substrates intentionally off-oriented towards one of the nearest [110] directions. high-resolution triple-crystal reciprocal-space maps recorded for different azimuth angles in the vicinity of the (004) bragg diffraction clearly show a double periodicity of the x-ray peak intensity that can be ascribed to a lateral and a vertical periodicity occurring parallel and perpendicular to the growth surface. moreover, from the intensity modulation of the satellite peaks, a lateral-strain gradient within the epilayer unit cell is found, varying from a tensile to a compressive strain. thus, the substrate off-orientation promotes a lateral modulation of the layer thickness (ordered interface roughness) and of the lattice strain, giving rise to laterally ordered macrosteps. in this respect, contour maps of the specular reflected beam in the vicinity of the (000) reciprocal lattice point were recorded in order to inspect the vertical and lateral interface roughness correlation, a semiquantitative analysis of our results shows that the interface morphology and roughness is greatly influenced by the off-orientation angle and the lateral strain distribution. two mean spatial wavelengths can be determined, one corresponding exactly to the macrostep periodicity and the other indicating a further interface waviness along the macrosteps. the same spatial periodicities were found on the surface by atomic-force-microscopy images confirming the x-ray results and revealing a strong vertical correlation of the interfaces up to the outer surface.
WOS关键词MOLECULAR-BEAM EPITAXY ; X-RAY-DIFFRACTION ; SURFACE-MORPHOLOGY ; ROUGHNESS ; FILMS ; HETEROSTRUCTURES ; MULTILAYERS ; INGAAS
WOS研究方向Physics
WOS类目Physics, Condensed Matter
语种英语
WOS记录号WOS:A1997WL49900064
出版者AMER PHYSICAL SOC
URI标识http://www.irgrid.ac.cn/handle/1471x/2428503
专题半导体研究所
通讯作者Giannini, C
作者单位1.UNIV MARBURG, ZENTRUM MAT WISSENSCH, D-35032 MARBURG, GERMANY
2.UNIV MARBURG, FACHBEREICH PHYS, D-35032 MARBURG, GERMANY
3.CHINESE ACAD SCI, INST SEMICOND, BEIJING 100083, PEOPLES R CHINA
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GB/T 7714
Giannini, C,Tapfer, L,Zhuang, Y,et al. Structural ordering and interface morphology in symmetrically strained (gain)as/ga(pas) superlattices grown on off-oriented gaas(100)[J]. Physical review b,1997,55(8):5276-5283.
APA Giannini, C,Tapfer, L,Zhuang, Y,De Caro, L,Marschner, T,&Stolz, W.(1997).Structural ordering and interface morphology in symmetrically strained (gain)as/ga(pas) superlattices grown on off-oriented gaas(100).Physical review b,55(8),5276-5283.
MLA Giannini, C,et al."Structural ordering and interface morphology in symmetrically strained (gain)as/ga(pas) superlattices grown on off-oriented gaas(100)".Physical review b 55.8(1997):5276-5283.

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来源:半导体研究所

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