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Nitrogen vacancy scattering in n-gan grown by metal-organic vapor phase epitaxy

文献类型:期刊论文

作者Zhu, QS; Sawaki, N
刊名Applied physics letters
出版日期2000-03-20
卷号76期号:12页码:1594-1596
ISSN号0003-6951
通讯作者Zhu, qs()
英文摘要Electron mobility limited by nitrogen vacancy scattering was taken into account to evaluate the quality of n-type gan grown by metal-organic vapor phase epitaxy. the nitrogen vacancy scattering potential used for our mobility calculation has to satisfy two requirements: such potential is (1) spatially short range, and (2) finite and not divergent at the vacancy core. a square-well potential was adopted to calculate the mobility, because it satisfies not only these two requirements, but also simplifies the calculation. as a result, the estimated mobility shows a t-1/2 temperature dependence, and is very sensitive to the potential well width. after introducing the nitrogen vacancy scattering, we obtained the best fitting between the calculated and experimental results for our high quality sample, and it was found that the measured mobility is dominated by ion impurity and dislocation scatterings at the low temperatures, but dominated by optical phonon and nitrogen vacancy scatterings at the high temperatures. (c) 2000 american institute of physics. [s0003-6951(00)04112-7].
WOS关键词LAYER
WOS研究方向Physics
WOS类目Physics, Applied
语种英语
WOS记录号WOS:000085857100036
出版者AMER INST PHYSICS
URI标识http://www.irgrid.ac.cn/handle/1471x/2428778
专题半导体研究所
通讯作者Zhu, QS
作者单位1.Chinese Acad Sci, Inst Semicond, Lab Semicond Mat Sci, Beijing 100083, Peoples R China
2.Nagoya Univ, Dept Elect, Chikusa Ku, Nagoya, Aichi 4648603, Japan
推荐引用方式
GB/T 7714
Zhu, QS,Sawaki, N. Nitrogen vacancy scattering in n-gan grown by metal-organic vapor phase epitaxy[J]. Applied physics letters,2000,76(12):1594-1596.
APA Zhu, QS,&Sawaki, N.(2000).Nitrogen vacancy scattering in n-gan grown by metal-organic vapor phase epitaxy.Applied physics letters,76(12),1594-1596.
MLA Zhu, QS,et al."Nitrogen vacancy scattering in n-gan grown by metal-organic vapor phase epitaxy".Applied physics letters 76.12(2000):1594-1596.

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来源:半导体研究所

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