中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semi-insulating gaas grown in outer space

文献类型:期刊论文

作者Chen, NF; Zhong, XR; Lin, LY; Xie, X; Zhang, M
刊名Materials science and engineering b-solid state materials for advanced technology
出版日期2000-06-01
卷号75期号:2-3页码:134-138
关键词Gaas Outer space Microgravity Integrated circuit
ISSN号0921-5107
通讯作者Chen, nf()
英文摘要A semi-insulating gaas single crystal ingot was grown in a recoverable satellite, within a specially designed pyrolytic boron nitride crucible, in a power-traveling furnace under microgravity. the characteristics of a compound semiconductor single crystal depends fundamentally on its stoichiometry, i.e. the ration of two types of atoms in the crystal. a practical technique for nondestructive and quantitative measuring stoichiometry in gaas single crystal was used to analyze the space-grown gaas single crystal. the distribution of stoichiometry in a gaas wafer was measured for the first time. the electrical, optical and structural properties of the space-grown gaas crystal were studied systematically, device fabricating experiments prove that the quality of field effect transistors fabricated from direct ion-implantation in semi-insulating gaas wafers has a close correlation with the crystal's stoichiometry. (c) 2000 elsevier science s.a. all rights reserved.
WOS关键词SEMIINSULATING GALLIUM-ARSENIDE ; LEC-GAAS ; DEFECTS ; STOICHIOMETRY ; SEGREGATION ; CARBON ; BORON
WOS研究方向Materials Science ; Physics
WOS类目Materials Science, Multidisciplinary ; Physics, Condensed Matter
语种英语
WOS记录号WOS:000087378500010
出版者ELSEVIER SCIENCE SA
URI标识http://www.irgrid.ac.cn/handle/1471x/2428862
专题半导体研究所
通讯作者Chen, NF
作者单位1.Chinese Acad Sci, Inst Semicond, Lab Semicond Mat Sci, Beijing 100083, Peoples R China
2.CAST, Lanzhou Inst Phys, Lanzhou 625065, Peoples R China
3.Hebei Inst Semicond, Shijiazhuang 050002, Hebei, Peoples R China
推荐引用方式
GB/T 7714
Chen, NF,Zhong, XR,Lin, LY,et al. Semi-insulating gaas grown in outer space[J]. Materials science and engineering b-solid state materials for advanced technology,2000,75(2-3):134-138.
APA Chen, NF,Zhong, XR,Lin, LY,Xie, X,&Zhang, M.(2000).Semi-insulating gaas grown in outer space.Materials science and engineering b-solid state materials for advanced technology,75(2-3),134-138.
MLA Chen, NF,et al."Semi-insulating gaas grown in outer space".Materials science and engineering b-solid state materials for advanced technology 75.2-3(2000):134-138.

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来源:半导体研究所

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