Sputtering of zno buffer layer on si for gan blue light emitting materials
文献类型：期刊论文
| 作者 | He, HB; Fan, ZX; Yao, ZY; Tang, ZS |
| 刊名 | Science in china series e-technological sciences
 |
| 出版日期 | 2000-02-01 |
| 卷号 | 43期号:1页码:55-59 |
| 关键词 | Light emitting material Zno Magnetron sputtering Structure X-ray rocking curve |
| ISSN号 | 1006-9321 |
| 通讯作者 | Fan, zx() |
| 英文摘要 | The preparation of high quality zno/si substrates for the growth of gan blue light emitting materials is considered. zno thin films have been deposited on si(100) and si(lll) substrates by conventional magnetron sputtering. morphology, crystallinity and c-axis preferred orientation of zno thin films have been investigated by transmitting electron microscopy (tem), x-ray diffraction (xrd) and x-ray rocking curve (xrc). it is proved that the zno thin films have perfect structure. the full-width-at-half-maximum (fwhm) of the zno(002) xrc of these films is about 1 degrees, while the minimum is 0.353 degrees. this result is better than the minimum fwhm (about 2 degrees) reported by other research groups. moreover, comparison and discussion are given on film structure of zno/si(100) and zno/si(lll). |
| WOS关键词 | FILMS ; GROWTH |
| WOS研究方向 | Engineering ; Materials Science |
| WOS类目 | Engineering, Multidisciplinary ; Materials Science, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000085515000007 |
| 出版者 | SCIENCE PRESS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2428915 |
| 专题 | 半导体研究所 |
| 通讯作者 | Fan, ZX |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | He, HB,Fan, ZX,Yao, ZY,et al. Sputtering of zno buffer layer on si for gan blue light emitting materials[J]. Science in china series e-technological sciences,2000,43(1):55-59. |
| APA | He, HB,Fan, ZX,Yao, ZY,&Tang, ZS.(2000).Sputtering of zno buffer layer on si for gan blue light emitting materials.Science in china series e-technological sciences,43(1),55-59. |
| MLA | He, HB,et al."Sputtering of zno buffer layer on si for gan blue light emitting materials".Science in china series e-technological sciences 43.1(2000):55-59. |
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来源：半导体研究所
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