中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Indium doping effect on gan in the initial growth stage

文献类型:期刊论文

作者Yuan, HR; Lu, DC; Liu, XL; Chen, Z; Wang, XH; Wang, D; Han, PD
刊名Journal of electronic materials
出版日期2001-08-01
卷号30期号:8页码:977-979
关键词Gan Indium doping Initial growth stage Morphology Optical transmission Photoluminescence
ISSN号0361-5235
通讯作者Yuan, hr()
英文摘要Three minutes' growth was carried out to investigate the indium-doping effect on initially grown gan. indium-doped and undoped samples were grown by low-pressure metalorganic vapor phase epitaxy. atomic force microscope observation revealed that in-doping modified the morphology of the nuclei. indium-doping also enhanced wetting between the buffer and nuclei layers, which was also supported by optical transmission. photoluminescence suggested that indium-doping obviously enhanced band-edge related emission even in the nucleation stage. x-ray diffraction performed on samples grown for 20 minutes indicated improvement of the crystalline quality through indium-doping. the mechanism of the indium-doping effect was discussed.
WOS关键词VAPOR-PHASE EPITAXY ; BUFFER LAYER ; FILMS ; SAPPHIRE ; DEPOSITION
WOS研究方向Engineering ; Materials Science ; Physics
WOS类目Engineering, Electrical & Electronic ; Materials Science, Multidisciplinary ; Physics, Applied
语种英语
WOS记录号WOS:000170458500012
出版者MINERALS METALS MATERIALS SOC
URI标识http://www.irgrid.ac.cn/handle/1471x/2429028
专题半导体研究所
通讯作者Yuan, HR
作者单位Chinese Acad Sci, Inst Semicond, Lab Semicond Mat Sci, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Yuan, HR,Lu, DC,Liu, XL,et al. Indium doping effect on gan in the initial growth stage[J]. Journal of electronic materials,2001,30(8):977-979.
APA Yuan, HR.,Lu, DC.,Liu, XL.,Chen, Z.,Wang, XH.,...&Han, PD.(2001).Indium doping effect on gan in the initial growth stage.Journal of electronic materials,30(8),977-979.
MLA Yuan, HR,et al."Indium doping effect on gan in the initial growth stage".Journal of electronic materials 30.8(2001):977-979.

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来源:半导体研究所

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