Influence of ion energy and deposition temperature on the surface morphology of carbon films deposited by ion beams
文献类型：期刊论文
| 作者 | Liao, MY; Qin, FG; Chai, CL; Liu, ZK; Yang, SY; Yao, ZY; Wang, ZG |
| 刊名 | Acta physica sinica
 |
| 出版日期 | 2001-07-01 |
| 卷号 | 50期号:7页码:1324-1328 |
| 关键词 | Amorphous carbon Surface morphology Mass-selected low energy ion beam deposition |
| ISSN号 | 1000-3290 |
| 通讯作者 | Liao, my() |
| 英文摘要 | Carbon films were deposited by mass-selected ion beam technique with ion energies 50-200ev at a substrate temperature from room temperature to 80 degreesc,. for the energies used, smooth diamond-like carbon films were deposited at room temperature. when the substrate temperature was 600 degreesc,rough graphitic films were produced. but highly oriented carbon tubes were observed when the energies were larger than 140ev at 800 degreesc. they were perpendicular to the surface and parallel to each other. preferred orientation of graphite basic plane was observed by high-resolution electron microscopy. shallow ion implantation and stress are responsible for this orientation. |
| WOS关键词 | TETRAHEDRAL AMORPHOUS-CARBON ; BIAS-ENHANCED NUCLEATION ; ATOMIC-FORCE MICROSCOPY ; DIAMOND-LIKE CARBON ; SILICON ; GROWTH ; MODEL |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000169720600025 |
| 出版者 | CHINESE PHYSICAL SOC |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2429036 |
| 专题 | 半导体研究所 |
| 通讯作者 | Liao, MY |
| 作者单位 | Chinese Acad Sci, Inst Semicond, Lab Semicond Mat Sci, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liao, MY,Qin, FG,Chai, CL,et al. Influence of ion energy and deposition temperature on the surface morphology of carbon films deposited by ion beams[J]. Acta physica sinica,2001,50(7):1324-1328. |
| APA | Liao, MY.,Qin, FG.,Chai, CL.,Liu, ZK.,Yang, SY.,...&Wang, ZG.(2001).Influence of ion energy and deposition temperature on the surface morphology of carbon films deposited by ion beams.Acta physica sinica,50(7),1324-1328. |
| MLA | Liao, MY,et al."Influence of ion energy and deposition temperature on the surface morphology of carbon films deposited by ion beams".Acta physica sinica 50.7(2001):1324-1328. |
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来源：半导体研究所
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