Ion bombardment as the initial stage of diamond film growth
文献类型：期刊论文
| 作者 | Liao, MY; Qin, FG; Zhang, JH; Liu, ZK; Yang, SY; Wang, ZG; Lee, ST |
| 刊名 | Journal of applied physics
 |
| 出版日期 | 2001-02-01 |
| 卷号 | 89期号:3页码:1983-1985 |
| ISSN号 | 0021-8979 |
| 通讯作者 | Liao, my() |
| 英文摘要 | It is believed that during the initial stage of diamond film growth by chemical-vapor deposition (cvd), ion bombardment is the main mechanism in the bias-enhanced-nucleation (ben) process. to verify such a statement, experiments by using mass-separated ion-beam deposition were carried out, in which a pure carbon ion beam, with precisely defined low energy, was selected for investigating the ion-bombardment effect on a si substrate. the results are similar to those of the ben process, which supports the ion-bombardment-enhanced-nucleation mechanism. the formation of sp(3) bonding is based on the presumption that the time of stress generation is much shorter than the duration of the relaxation process. the ion-bombarded si is expected to enhance the cvd diamond nucleation density because the film contains amorphous carbon embedded with nanocrystalline diamond and defective graphite. (c) 2001 american institute of physics. |
| WOS关键词 | BIAS-ENHANCED NUCLEATION ; CHEMICAL-VAPOR-DEPOSITION ; BEAM DEPOSITION ; MECHANISM ; SILICON ; SPECTROSCOPY |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000166644400071 |
| 出版者 | AMER INST PHYSICS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2429096 |
| 专题 | 半导体研究所 |
| 通讯作者 | Liao, MY |
| 作者单位 | 1.Chinese Acad Sci, Inst Semicond, Lab Semicond Mat Sci, Beijing 100083, Peoples R China 2.City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Hong Kong, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liao, MY,Qin, FG,Zhang, JH,et al. Ion bombardment as the initial stage of diamond film growth[J]. Journal of applied physics,2001,89(3):1983-1985. |
| APA | Liao, MY.,Qin, FG.,Zhang, JH.,Liu, ZK.,Yang, SY.,...&Lee, ST.(2001).Ion bombardment as the initial stage of diamond film growth.Journal of applied physics,89(3),1983-1985. |
| MLA | Liao, MY,et al."Ion bombardment as the initial stage of diamond film growth".Journal of applied physics 89.3(2001):1983-1985. |
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来源：半导体研究所
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