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Improved purity of long-wavelength inassb epilayers grown by melt epitaxy in fused silica boats

文献类型:期刊论文

作者Gao, YZ; Kan, H; Gao, FS; Gong, XY; Yamaguchi, T
刊名Journal of crystal growth
出版日期2002
卷号234期号:1页码:85-90
关键词Purification X-ray diffraction Melt epitaxy Narrow gap materials Semiconducting iii-v materials
ISSN号0022-0248
通讯作者Yamaguchi, t()
英文摘要In this study, we first present the process of the melt epitaxial (me) growth method, and the improvement of low-temperature electron mobility of the long-wavelength inassb epilayers grown by me in a fused silica boat. the electrical properties were investigated by van der pauw measurement at 300 and 77 k. it is seen that the electron mobility of the inassb samples grown by graphite boat decreased from 55,700 to 26,600 cm(2)/v s when the temperature was reduced from 300 to 77 k, while for the samples grown by fused silica boat, the electron mobility increased from 52,600 at 300 k to 54,400 cm(2)/v s at 77 k. the electron mobility of 54,400cm(2)/vs is the best result, so far, for the inassb materials with cutoff wavelength of 8-12 mum at 77 k. this may be attributed to the reduction of the carbon contamination by using a fused silica boat instead of a graphite boat. (c) 2002 elsevier science b.v. all rights reserved.
WOS关键词CUTOFF WAVELENGTH ; SINGLE-CRYSTALS ; MU-M ; INFRARED PHOTODETECTORS ; GAAS
WOS研究方向Crystallography ; Materials Science ; Physics
WOS类目Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied
语种英语
WOS记录号WOS:000172034400011
出版者ELSEVIER SCIENCE BV
URI标识http://www.irgrid.ac.cn/handle/1471x/2429116
专题半导体研究所
通讯作者Yamaguchi, T
作者单位1.Shizuoka Univ, Elect Res Inst, Hamamatsu, Shizuoka 432, Japan
2.Hamamatsu Photon KK, Cent Res Lab, Hamakita 434, Japan
3.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Gao, YZ,Kan, H,Gao, FS,et al. Improved purity of long-wavelength inassb epilayers grown by melt epitaxy in fused silica boats[J]. Journal of crystal growth,2002,234(1):85-90.
APA Gao, YZ,Kan, H,Gao, FS,Gong, XY,&Yamaguchi, T.(2002).Improved purity of long-wavelength inassb epilayers grown by melt epitaxy in fused silica boats.Journal of crystal growth,234(1),85-90.
MLA Gao, YZ,et al."Improved purity of long-wavelength inassb epilayers grown by melt epitaxy in fused silica boats".Journal of crystal growth 234.1(2002):85-90.

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来源:半导体研究所

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