Low power 2 x 2 thermo-optic soi waveguide switch fabricated by anisotropy chemical etching
文献类型：期刊论文
| 作者 | Xia, JS; Yu, JZ; Wang, ZT; Fan, ZC; Chen, SW |
| 刊名 | Optics communications
 |
| 出版日期 | 2004-03-01 |
| 卷号 | 232期号:1-6页码:223-228 |
| 关键词 | Optical switch Thermo-optic Multimode interferometer Waveguide Anisotropy chemical etching |
| ISSN号 | 0030-4018 |
| DOI | 10.1016/j.optcom.2003.12.074 |
| 通讯作者 | Xia, js(jsxia@red.semi.ac.cn) |
| 英文摘要 | A 2 x 2 thermo-optic (to) mach-zehnder (mz) switch based on silicon waveguides with large cross section was designed and fabricated on silicon-on-insulator (soi) wafer. the multi-mode interferometers (mmi) were used as power splitter and combiner in mz structure. in order to get smooth interface, anisotropy chemical wet-etching of silicon was used to fabricate the waveguides instead of dry-etching. additional grooves were introduced to reduce power consumption. the device has a low switching power of 235 mw and a switching speed of 60 mus. (c) 2004 elsevier b.v. all rights reserved. |
| WOS关键词 | SINGLE-MODE ; SILICON ; MODULATOR |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000189215100027 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2429389 |
| 专题 | 半导体研究所 |
| 通讯作者 | Xia, JS |
| 作者单位 | Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Xia, JS,Yu, JZ,Wang, ZT,et al. Low power 2 x 2 thermo-optic soi waveguide switch fabricated by anisotropy chemical etching[J]. Optics communications,2004,232(1-6):223-228. |
| APA | Xia, JS,Yu, JZ,Wang, ZT,Fan, ZC,&Chen, SW.(2004).Low power 2 x 2 thermo-optic soi waveguide switch fabricated by anisotropy chemical etching.Optics communications,232(1-6),223-228. |
| MLA | Xia, JS,et al."Low power 2 x 2 thermo-optic soi waveguide switch fabricated by anisotropy chemical etching".Optics communications 232.1-6(2004):223-228. |
入库方式： iSwitch采集
来源：半导体研究所
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