Long-wavelength sige/si mqw resonant-cavity-enhanced photodiodes (rce-pd)
文献类型：期刊论文
| 作者 | Yu, JZ; Li, C; Cheng, BW; Wang, QM |
| 刊名 | Gettering and defect engineering in semiconductor technology
 |
| 出版日期 | 2004 |
| 卷号 | 95-96页码:255-260 |
| 关键词 | Dbr (distributed bragg reflector) Mqw (multiple quantum wells) Optical fiber communication Photodiode Rce-pd (resonant-cavity-enhanced photodiode) Responsivity Sige/si Soi |
| ISSN号 | 1012-0394 |
| 通讯作者 | Yu, jz(jzyu@red.semi.ac.cn) |
| 英文摘要 | Si1-xgex/si optoelectronic devices are promising for the monolithic integration with silicon-based microelectronics. sige/si mqw rce-pd (resonant-cavity-enhanced photodiodes) with different structures were investigated in this work. design and fabrication of top- and bottom-incident rce-pd, such as growth of sige mqw (multiple quantum wells) on si and soi (si on insulator) wafers, bonding between sige epitaxial wafer and sor (surface optical reflector) consisting of sio2/si dbr (distributed bragg reflector) films on si, and performances of rce-pd, were presented. the responsivity of 44ma/w at 1.314 mum and the fwhm of 6nm were obtained at bias of 10v. the highest external quantum efficiency measured in the investigation is 4.2%. |
| WOS研究方向 | Materials Science ; Physics |
| WOS类目 | Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter |
| 语种 | 英语 |
| WOS记录号 | WOS:000189347700037 |
| 出版者 | TRANS TECH PUBLICATIONS LTD |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2429462 |
| 专题 | 半导体研究所 |
| 通讯作者 | Yu, JZ |
| 作者单位 | Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yu, JZ,Li, C,Cheng, BW,et al. Long-wavelength sige/si mqw resonant-cavity-enhanced photodiodes (rce-pd)[J]. Gettering and defect engineering in semiconductor technology,2004,95-96:255-260. |
| APA | Yu, JZ,Li, C,Cheng, BW,&Wang, QM.(2004).Long-wavelength sige/si mqw resonant-cavity-enhanced photodiodes (rce-pd).Gettering and defect engineering in semiconductor technology,95-96,255-260. |
| MLA | Yu, JZ,et al."Long-wavelength sige/si mqw resonant-cavity-enhanced photodiodes (rce-pd)".Gettering and defect engineering in semiconductor technology 95-96(2004):255-260. |
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来源：半导体研究所
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