Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si
文献类型：期刊论文
| 作者 | Hu YQ(胡宇群) ; Zhao YP(赵亚溥); Yu TX(余同希)
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| 刊名 | International Journal of Nonlinear Sciences and Numerical Simulation
 |
| 出版日期 | 2008 |
| 页码 | 315-322 |
| 通讯作者邮箱 | yzhao@imech.ac.cn |
| 关键词 | Fractal Pattern Dla Anodic Bonding Aluminum Interlayer Mems Diffusion-Limited Aggregation Ion Drift Processes Borosilicate Glass Depletion Films Si |
| ISSN号 | 1565-1339 |
| 通讯作者 | Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China. |
| 中文摘要 | Anodic bonding of Pyrex glass/Al/Si is an important bonding technique in micro/nanoelectromechanical systems (MEMS/NEMS) industry. The anodic bonding of Pyrex 7740 glass/Aluminum film/Silicon is completed at the temperature from 300 degrees C to 375 degrees C with a bonding voltage between 150 V and 450 V. The fractal patterns are formed in the intermediate Al thin film. This pattern has the fractal dimension of the typical two-dimensional diffusion-limited aggregation (2D DLA) process, and the fractal dimension is around 1.7. The fractal patterns consist of Al and Si crystalline grains, and their occurrences are due to the limited diffusion, aggregation, and crystallization of Si and Al atoms in the intermediate Al layers. The formation of the fractal pattern is helpful to enhance the bonding strength between the Pyrex 7740 glass and the aluminum thin film coated on the crystal silicon substrates. |
| 类目[WOS] | Engineering, Multidisciplinary ; Mathematics, Applied ; Mechanics ; Physics, Mathematical |
| 研究领域[WOS] | Engineering ; Mathematics ; Mechanics ; Physics |
| 关键词[WOS] | DIFFUSION-LIMITED AGGREGATION ; ION DRIFT PROCESSES ; BOROSILICATE GLASS ; DEPLETION ; FILMS ; SI |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000260106100002 |
| 公开日期 | 2009-08-03 ; 2009-09-14 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/25874]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Hu YQ,Zhao YP,Yu TX. Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si[J]. International Journal of Nonlinear Sciences and Numerical Simulation,2008:315-322. |
| APA | 胡宇群,赵亚溥,&余同希.(2008).Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si.International Journal of Nonlinear Sciences and Numerical Simulation,315-322. |
| MLA | 胡宇群,et al."Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si".International Journal of Nonlinear Sciences and Numerical Simulation (2008):315-322. |
入库方式： OAI收割
来源：力学研究所
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